JPS6284157U - - Google Patents
Info
- Publication number
- JPS6284157U JPS6284157U JP17601585U JP17601585U JPS6284157U JP S6284157 U JPS6284157 U JP S6284157U JP 17601585 U JP17601585 U JP 17601585U JP 17601585 U JP17601585 U JP 17601585U JP S6284157 U JPS6284157 U JP S6284157U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage
- sample stage
- chamber
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000003550 marker Substances 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17601585U JPS6284157U (2) | 1985-11-15 | 1985-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17601585U JPS6284157U (2) | 1985-11-15 | 1985-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284157U true JPS6284157U (2) | 1987-05-29 |
Family
ID=31115869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17601585U Pending JPS6284157U (2) | 1985-11-15 | 1985-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284157U (2) |
-
1985
- 1985-11-15 JP JP17601585U patent/JPS6284157U/ja active Pending
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