JPS6284447A - Stamper for optical memory element substrate - Google Patents

Stamper for optical memory element substrate

Info

Publication number
JPS6284447A
JPS6284447A JP22459785A JP22459785A JPS6284447A JP S6284447 A JPS6284447 A JP S6284447A JP 22459785 A JP22459785 A JP 22459785A JP 22459785 A JP22459785 A JP 22459785A JP S6284447 A JPS6284447 A JP S6284447A
Authority
JP
Japan
Prior art keywords
stamper
optical memory
memory element
element substrate
metal plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22459785A
Other languages
Japanese (ja)
Inventor
Akira Takahashi
明 高橋
Michinobu Saegusa
理伸 三枝
Kazuo Ban
和夫 伴
Tomoyuki Miyake
知之 三宅
Yoshiteru Murakami
善照 村上
Kenji Oota
賢司 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP22459785A priority Critical patent/JPS6284447A/en
Publication of JPS6284447A publication Critical patent/JPS6284447A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、レーザ光等の光学的手段により情報の記録・
再生・消去等を行う光メモリ素子の製造に用いられる光
メモリ素子基板用スタンパの改良に関するものである。Detailed Description of the Invention (Industrial Field of Application) The present invention provides information recording and
The present invention relates to an improvement of a stamper for an optical memory element substrate used for manufacturing optical memory elements that perform playback, erasing, etc.

（従来の技術） 近年、大容置、高密度、高速アクセス化の可能な光メモ
リ素子への要望が高まる中で、アクリル樹脂等の合成樹
脂を基板とする光メモリ素子の研究開発が活発に行われ
ている。(Prior Art) In recent years, with the increasing demand for optical memory devices capable of large capacity, high density, and high speed access, research and development of optical memory devices using synthetic resins such as acrylic resin as substrates has been actively conducted. ing.

従来、このような合成樹脂基板の製造にはスタンパを必
要とし、この種のスタンパは多くの場合衣の２種の方法
で製造された。Conventionally, the production of such synthetic resin substrates requires a stamper, and this type of stamper has been produced in many cases by two methods.

第１の方法は、ガラス板−１−に感光層を形成し、その
感光層にレーザ光等で情作信号またはガイドトランクを
記録した後、導電膜をコートし、次に電鋳法によりスタ
ンパを製造する方法である。The first method is to form a photosensitive layer on a glass plate-1-, record an emotional signal or guide trunk on the photosensitive layer with a laser beam, etc., coat it with a conductive film, and then stamp it by electroforming. This is a method of manufacturing.

また、第２の方法は、Ｎｉ等の金属板上に感光層を形成
し、その感光層にレーリ′光等で情報信号またはガイド
トラックを記録した後、前記感光層をマスクとして金属
板をエツチングし、この金属板をスタンパとする方法で
ある。この第２の方法により製造されたスタンパの一例
を第２図に示す。In the second method, a photosensitive layer is formed on a metal plate such as Ni, information signals or guide tracks are recorded on the photosensitive layer using Rayleigh light, etc., and then the metal plate is etched using the photosensitive layer as a mask. This method uses this metal plate as a stamper. An example of a stamper manufactured by this second method is shown in FIG.

なお、図中、符号ａは金属板、ｂは情報ビットまたはガ
イドトランクである。In addition, in the figure, the symbol a is a metal plate, and the symbol b is an information bit or a guide trunk.

（発明が解決しようとする問題点） ところで、従来、上記第２の方法において使用される金
属にはＮｉが用いられてきたが、スタンパとしての表面
硬度が十分ではなく、このため繰り返し使用していくう
ちに表面形状が崩れてくるという問題点があった。この
ような現象は、基板に使用する合成樹脂の粘度が高い場
合や、流動性の悪い状態での使用時に顕著で、スタンパ
の寿命を縮める原因となってきた。(Problems to be Solved by the Invention) Conventionally, Ni has been used as the metal used in the second method, but its surface hardness as a stamper is not sufficient, and for this reason, it cannot be used repeatedly. There was a problem in that the surface shape deteriorated over time. Such a phenomenon is noticeable when the synthetic resin used for the substrate has a high viscosity or when used in a state with poor fluidity, and has been a cause of shortening the life of the stamper.

（問題点を解決するための手段） 本発明の光メモリ素子基板用スタンパは、表面が窒化物
でコーティングされたものである。(Means for Solving the Problems) The stamper for an optical memory element substrate of the present invention has a surface coated with nitride.

（作用） 表面にコーティングされた窒化物により、スタンパの表
面硬度が高められ、耐久性が改善される。(Function) The nitride coated on the surface increases the surface hardness of the stamper and improves its durability.

（実施例） 以下、本発明の一実施例を図面を参照して説明する。(Example) Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第１図は、本発明に係る光メモリ素子基板用スタンパの
構成を示し、このスタンパは、例えばＮｉ等の金属板１
の表面にｊＩＮ層２が形成されたものである。FIG. 1 shows the structure of a stamper for an optical memory element substrate according to the present invention.
A jIN layer 2 is formed on the surface.

金属板１は、Ｎｉ板の表面に感光層を形成し、その感光
層にレーザ光等で情報信号またはガイドトランクを記録
した後、前記感光層をマスクとして表面をエツチングす
ることにより製造されたもので、表面には情報ビットま
たはガイドトラック３・・・が形成されている。The metal plate 1 is manufactured by forming a photosensitive layer on the surface of a Ni plate, recording an information signal or a guide trunk on the photosensitive layer with a laser beam, etc., and then etching the surface using the photosensitive layer as a mask. Information bits or guide tracks 3 . . . are formed on the surface.

ＡＪＮ層２は、」二記のようにして形成された金属板１
の表面にスパッタ法に３Ｌり適宜の厚みに形成されたも
のである。このＡＮＮ層２は、そのモース硬度が７であ
り、Ｎ１の金属板１のモース硬度が３．８であるのに対
して極′めて高く、したがってスタンパの表面硬度が従
来のものよりも高いものである。The AJN layer 2 is a metal plate 1 formed as described in ``2''.
It was formed on the surface of the substrate to a suitable thickness of 3L using a sputtering method. This ANN layer 2 has a Mohs hardness of 7, which is extremely high compared to the Mohs hardness of the N1 metal plate 1 of 3.8, and therefore the surface hardness of the stamper is higher than that of the conventional stamper. It is something.

なお、金属板１の表面にコーティングする窒化物は本発
明の主旨の範囲であればＡＩＮに限定されるものではな
く、例えばＳｉＮ、ＢＮ、ＴＩＮ。Note that the nitride coated on the surface of the metal plate 1 is not limited to AIN as long as it is within the spirit of the present invention, and may be, for example, SiN, BN, or TIN.

ＴａＮ等の他の窒化物であってもよい。また、金属板ｌ
もＮｉに限定されるものではない。Other nitrides such as TaN may also be used. Also, metal plate l
is not limited to Ni either.

（発明の効果） 本発明によれば、スタンパの耐久性が従来のものに比べ
て大幅に長くなるだけでなく、光メモリ素子の基板とし
て、従来使用不可能であった粘度の高い合成樹脂や流動
性の低い状態での合成樹脂が使用可能となる。また、ス
タンパの金属も硬度が従来はど高いものである必要はな
くなるため、Ｎｉ以外の選択が可能となる。(Effects of the Invention) According to the present invention, not only is the durability of the stamper significantly longer than that of conventional stampers, but also it is possible to use highly viscous synthetic resins and fluids that were previously unusable as substrates for optical memory elements. It becomes possible to use synthetic resins with low properties. Further, since the metal of the stamper does not need to be as hard as conventionally, it is possible to select a metal other than Ni.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明に係る光メモリ素子基板用スタンパの一
実施例を示す断面図、第２図は従来の光メモリ素子基板
用スタンパを示す断面図である。 １・・・金属板　　　　　２・・・ＡＩＮ層第７図 トFIG. 1 is a sectional view showing an embodiment of a stamper for an optical memory element substrate according to the present invention, and FIG. 2 is a sectional view showing a conventional stamper for an optical memory element substrate. 1...Metal plate 2...AIN layer Figure 7

Claims (1)

【特許請求の範囲】 １）金属板を素材とする光メモリ素子基板用スタンパに
おいて、 表面が窒化物でコーティングされたことを特徴とする光
メモリ素子基板用スタンパ。[Scope of Claims] 1) A stamper for an optical memory element substrate made of a metal plate, the surface of which is coated with nitride.
JP22459785A 1985-10-08 1985-10-08 Stamper for optical memory element substrate Pending JPS6284447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22459785A JPS6284447A (en) 1985-10-08 1985-10-08 Stamper for optical memory element substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22459785A JPS6284447A (en) 1985-10-08 1985-10-08 Stamper for optical memory element substrate

Publications (1)

Publication Number Publication Date
JPS6284447A true JPS6284447A (en) 1987-04-17

Family

ID=16816216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22459785A Pending JPS6284447A (en) 1985-10-08 1985-10-08 Stamper for optical memory element substrate

Country Status (1)

Country Link
JP (1) JPS6284447A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102588904B1 (en) * 2022-05-09 2023-10-16 주식회사 씽크아이 In-Cabin Security Sensor Installed at a Car

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102588904B1 (en) * 2022-05-09 2023-10-16 주식회사 씽크아이 In-Cabin Security Sensor Installed at a Car

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