JPS6289310A - Magnetically soft thin film - Google Patents

Abstract

PURPOSE:To obtain the titled soft magnetic thin film having a high permeability, an excellent corrosion-resisting property, an excellent abrasion-resisting property of high degree of hardness, and thermal stability without lowering the density of saturated magnetic flux and also without increasing coercive force by a method wherein nitrogen N is added to the magnetic thin film having Fe, Co, Si and Al as the main components, and the composition of the component of the magnetic thin film is specified. CONSTITUTION:A magnetic thin film is composed of Fe, Co, Si and Al as the main component, the magnetic thin film is composed of Co of 0.5-15atom%, Si of 9-17atom%, Al of 7-15atom%, N of 0.01-10atom% and the remainder of Fe, and excellent serviceability is given to the magnetic thin film. If the content of nitrogen N is 0.01atom% or less, it is considered insufficient, and if said content exceeds 10atom%, the permeability of the magnetic thin film is decreased on the contrary, and magnetic coercive force Hc is made larger. It is desirable that the magnetically soft thin film is manufactured by performing a vapor deposition method, an ion-implanting method and the like. Also, pertaining to the introducing method of nitrogen N into the magnetic thin film, there are the method in which vapor deposition and the like is performed in the atmosphere containing nitrogen gas and the nitrogen N introducing method using the compound consisting of nitrogen N and at least a kind of element selected from the above-mentioned material and the alloy of the remaining component as the source of evaporation.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flexible film suitable for use in, for example, an i%lI* magnetic head.

[of invention]! 4 Requirements] The present invention is a soft magnetic purifier having a nitrogen-containing Fe-Co-Si-Al system composition, and by specifying the composition, the coercivity is small (C is small and the magnetic permeability μ is 19 < especially corrosion resistance and The hardness is increased by 3, and the magnetization is 4I + 0.

[Conventional technology]

In various magnetic recording endogenous devices u, demands for I Kusunoki density recording and Saikoku wave number have crystallized, and in response to these demands, 1. A magnetic recording medium with a saturation magnetization of 18i and a coercive force is used. Examples of this type of magnetic recording media include so-called metal tapes using powder of ferromagnetic metals such as Fe, Co, and Ni;
'J! T! Mff'[So-called vapor-deposited tapes made of metal lumber 1 coated on a base film have come to be used.

Along with this, magnetic heads for this type of magnetic recording medium are required to be made of a material with high saturation magnetic flux density and -j magnetic permeability, and also have a small magnetic W +[ and zero magnetostriction. It also has a small coercive force, and has the highest abrasion resistance and corrosion resistance possible as a head material.It is not only magnetically stable, but also chemically stable and has excellent mechanical properties. etc. are required.

On the other hand, with the shift to A-density recording, it is required to reduce the recording trunk width, and therefore the trunk width of the operating magnetic gear in the magnetic head. (In particular, with the aim of mass production, it is possible to apply a magnetic heel l' ml to a non-magnetic or magnetic substrate by demagnetizing it.
- Thin film technology used to deposit j' - Thin gland magnetism used -
The spread of SO1 is shocking. This kind of soft magnetic cleaning and +2
What about Sendust alloy 1116, which has Fe, Aβ, and Si as one component? Collect 1'11 and have ζ.

This sendust combination i & thin film has one mouth; saturation magnetic flux density B
s and comparatively lIi AM! IO:, so 1. +l'4% residual magnetic flux like the metal tape mentioned above! It is also possible to apply the present invention to magnetic recording media that have 14 If.

However, although this sendust alloy thin film has comparative inner hardness, it is inferior in wear resistance and corrosion resistance compared to, for example, ferrite materials. In addition, since this Sendust alloy thin film has a relatively low resistivity, when it is used as a 21゛゛〆 of a magnetic head, it causes a so-called eddy current +i4.
The magnetic permeability (lk) in the
However, there is a problem that a sufficient LF meat production output may not be obtained in the 1(°) frequency domain.

In contrast, instead of cleaning the sendust alloy, the j3 magnetic coefficient (1) in the surface frequency region is less disordered and the saturation magnetic flux density B
It is recommended to use an amorphous magnetic alloy material with a Due to heating and thermal cycles, the phantom 1 rate deteriorates greatly, and the self-IZ efficiency deteriorates.Especially, the crystallization (IJ ability (!l:) is large, so 5 (1
(It is impossible to apply a quality of 1'c or more for a long time, and for this reason, the manufacturing of magnetic heads-1, culm odor "ζ") There are problems such as the fact that it is not preferable to use 1- or so, which requires further processing.

Under these circumstances, research on soft magnetic + AI4 with even better soft magnetic properties is progressing, for example, in Tatsuharu Yamamoto and Hisashi Chiba, 1 Journal of the Japan Institute of Metals, Vol. 14 B, No. 2 'M.
In 1150, it was reported that a Pa-Co-5 alloy material containing Fe, Co, and Si as main components had good soft magnetic properties.

However, the Fe-Go-5L thread alloy material 4J is extremely brittle and has poor practical use, and there is a problem in using it as it is as a magnetic head.

[Problems that the invention seeks to solve] The present invention aims to improve the problems mentioned above, and improves magnetic properties,
The saturation magnetic flux density Bs is small, the coercive force 1C is small, the magnetostriction λS is almost zero, the magneto-optical strength is small, and it has mechanical properties, that is, commercial hardness, and wear resistance and specific gravity. , thermally stable and heat resistant, and chemically stable,
4' Soft FDL with corrosion resistance of 14+ 4'),'
r? This increases the J film to (+4).

[Means for solving problem Jjλ]

The present invention solves the problems described above without reducing the saturation magnetic flux density etc. by not adding nitrogen #N to the magnetic cleaning material containing FL, (: θ, Si and 8β as one component). It is based on the discovery that improvements can be made.

4, the present invention uses lie, Go, 5IBL, and An as components, and the composition is adjusted such that CO is 0.5 to 1.
5 atomic %, Sl is IJ~17 atomic %, ^β is 7~15 atomic %, N is 0.01~IO) %, and the balance is Fe.

Incidentally, one of the soft magnetic thin film according to the present invention having the above-mentioned composition fr.
The thickness is preferably 10 to 11 mm, and more preferably 10 to 100 μm or less.

[Effect]

As mentioned above, the magnetic bamboo strip according to the present invention is made of Fe+Co
, Si and A/ as components, and the addition of ^β creates a soft magnetic material with high magnetic permeability and low coercive force and magnetostriction compared to CFe-Co-Sl soft magnetic materials. In addition, the present invention is characterized by containing nitrogen N, which significantly improves particularly the magnetic permeability and hardness, and improves the specific resistance.

According to experiments conducted in the present invention, as the nitrogen content increases during magnetic WJ tests, the magnetic permeability rapidly increases.
+7, for example, when the nitrogen N content is about 1.7 at%
The magnetic permeability is approximately 2.
It was found to be up to 5 times as much. In addition, this magnetic permeability is
If the content of nitrogen N contained in the magnetic thin film increases too much, the ζ will actually decrease.However, although this is U7, the specific JIV resistance increases as nitrogen NQ)@self!d increases. If we consider the use in the 1141 frequency range, for example, the use in high-temperature heads for digital VTRs, etc., we can see that the film M has a practical value of +1 up to the extent of to+g<%. ■Becomes Noh.

In addition, as the N content in the magnetic thin film increases, C,
It was found that when the N(1) content exceeds about 2%, a nearly constant hardness can be secured when the Vickers hardness is rapidly sieved.

In other words, P((-Oo-8i-^p thread magnetic P) according to the present invention
Nitrogen N contained in a thin layer (1i) is expected to have a sufficient effect if its content is less than 0.01%, and its content is 1()16 If it exceeds % (
Since there is a risk that the magnetic permeability will be low and the coercivity will be large, a value of 0.01 to 1 ()1 Kyoko% is selected.

In addition, the soft magnetic thin powder according to the present invention (CoQ) gold is 0.5 to 1519%. This is because when outside this range, an increase in coercive force and a low i3 fd'z ratio of 1.

In addition, for S+ and A#, C has Si of 9 to 1, respectively.
7) Prince %, 8 rho needs to be 7-15 atomic %.

If the content of Si and Aρ is outside these ranges, for example, the coercive force will be low, and the magnetic head's 217 material will not be used. At the same time, the saturation magnetic flux density will be low ( In contrast, if the range described in 1-1 is used, a reduction in coercive force, an increase in west saturation magnetic flux density, and a decrease in magnetic permeability will be achieved, reaching zero in history ( 6 distortion is obtained.

〔Example〕

As a method for manufacturing the soft magnetic thin film according to the present invention, a so-called vapor phase thin film generation technique is preferably used. (ljl because 2(ra,
For example, it is difficult to uniformly introduce a large amount of nitrogen using the conventional dissolution method. However, during the melting of the alloy, the circulating nitrogen becomes slag and C floats to the surface, becoming an impurity and being separated from the alloy.

Therefore, it is preferable that the magnetization t11 thin test according to the present invention be produced by a vapor deposition method, an ion implantation method, or the like. Vapor deposition methods include (i; +, for example, flash vapor deposition, gas deposition lJ, -, ion blasting, sputtering, cluster ion single method, etc.), and even if vapor deposition and ion implantation are performed at the same time. In addition, a method of introducing nitrogen N into the magnetic 8 film is used, and C is deposited in an atmosphere containing 1,1 nitrogen gas, and depending on the concentration of this nitrogen gas, A method of adjusting and introducing nitrogen N content in magnetic 411 thin film.

(2) A compound of nitrogen N and at least one element of each component, and an alloy of the remaining components as an evaporation source.
A method of introducing nitrogen N into the obtained magnetic thin film using the above method can be mentioned. In addition, the ``4 P'' that constitutes the magnetic iIF thin gland
A method of adjusting the composition of each component such as Fe, Co, St, etc. , these are melted in advance in a commercial wave melting furnace, etc. to form an alloy ingot, and this alloy ingot is used as an evaporation source.
(2) A method in which the evaporation source of a single element in each component is lowered and the composition is controlled by the number of evaporation sources; (3) A method in which the evaporation source of a single element in each component is used. (4) A method of implanting other elements while evaporating C while using an alloy as an evaporation barrier; etc.

Example 1 Electrolytic iron, electrolytic cobalt, metallic silicon, and aluminum were used as raw materials. These raw materials were weighed (separated, then melted in a vacuum using a commercial wave melting furnace, poured into a mold, and formed. An electrode target with a diameter of 50 m and a diameter of 1 u+ was prepared.

Sputtering was carried out using a magnetron type sputtering device using the following targets and following the sputtering conditions described in 1.

Sputtering conditions RF Nomawa -
10 (IW stud/basic handling distance 1ii11 3fl
Oboro X, handling temperature ~20℃ (water cooling) ultimate vacuum 3
r gland thickness approx. 2. E)～
3.1 μm-1- Inert + I according to Subatta Article 4Q
Sputtering was performed using I gas and R gas, with N2 mixed in with the other gas. Here, sputtering was performed while controlling the amount of N2 mixed in with minute IE and changing the ratio of N2, and the Be-Co-
A 5L thread alloy s-gland was formed. The obtained Fe-Go-,S
The L-based alloy thin strips were heat treated (annealed) at 500°C and 650°C for 1 hour.

Example 1 shows the film compositions obtained when the N2 gas distribution is changed, and the I,! 8 Magnetic Mei+MH□ and +h+4 ft!
The results of measuring It l'l are shown in the second drawing']. still,
Regarding the measurement of each composition, N was measured using the inner gas dissonance (thermal conductivity) method;
c Probe Micro Analsis). In addition, to measure the corrosion resistance, the measurement sample was immersed in a 1N NaCI solution for 9 hours, and the surface rust state was evaluated at 1-N.
1-visual observation: ◎ indicates that the mirror surface was maintained, 0 indicates that the surface is cloudy (η-), and Δ indicates that thin rust has appeared partially.

Incidentally, for comparison, the measurement results for "ζ" are also shown in the table of the same figure for those not containing N.

As is clear from these measurement results, the N-containing soft magnetic thin film according to the present invention does not significantly impair the coercive IC compared to the soft magnetic thin film that does not contain N, and has a similar magnetic permeability and corrosion resistance. The direction -L is measured.

As described above, the soft magnetic 8-magnetic material according to the present invention has a +
11] Improved magnetic permeability and corrosion resistance 4) However, in history, high hardness was achieved and wear resistance improved, and at this time saturation magnetic flux density and No deterioration of magnetic properties such as coercive force is observed. In particular, as more nitrogen is added, the specific resistance increases, and the eddy current outbreak in the commercial wave region becomes smaller.
It is extremely useful for magnetic fields and throats used in the 1111 frequency range of 10 MIIz-1.

Although the details of the role played by nitrogen N in this magnetic WJIIQ are unknown, as the hardness increases significantly, it is expected that nitridation of He and the formation of high hardness particles such as silicon nitride are likely to occur.

Furthermore, in the soft magnetic thin film according to the present invention described above, various elements have been used as additives (or may be added) in order to improve corrosion resistance, abrasion resistance, and other properties of each persimmon tokutoku.

An example of an element used as this additive is Tl.

rVa group phosphorus elements such as Zr and Hf; Va group ye such as Nb and Ta;

Vla group elements such as element, Cr, Mo, and W; A group elements such as element and Mn; )r, elemental, i.e., Os, lr, PL, etc., and one or more of these additives may be used in combination to add 70 to 70 to the above magnetic thin film.
It can be added within the range of 10%.

In addition, if it is made of nitrogen, it can also contain oxygen together with nitrogen.

〔Effect of the invention〕

As mentioned above, according to the soft magnetic thin film according to the present invention, the saturation magnetic flux density is low and the coercive force is not increased.
It is possible to obtain a soft magnetic thin film that has high magnetic permeability, excellent corrosion resistance, high hardness and wear resistance, and also has excellent heat resistance without thermal instability like an amorphous magnetic thin film. For example, it can be used as a cleaning magnetic core of an s-type magnetic head for heavy density recording, and its benefits are extremely large.

[Brief explanation of drawings]

The figure is a table showing the composition of the soft magnetic thin film and the measurement results of each characteristic. Z-Zoku IIi original text: April 1986 Officially appointed to the Japan Patent Office Tomo Uga Michibu 1985 Patent Application No. 230466 3, Relationship with the case of the person making the amendment Patent applicant address Tokyo Parts Ward Kitashinyo 6-7-35 Name (2
1f+) Sony Corporation Representative Director Norio Ohga 4, Agent 6, Number of inventions increased by amendment (11 specifications, the scope of claims will be amended as in the attached sheet. (2) Same, page 6 In the 1st and 2nd lines, the words "rlO people" are corrected to "100 people." (3) Same, page 11, line 1 r 100WJ is r 250W
Correct it with J. Correct the statement to read "rFe-Co-5t AA system". In the above claims, Go is 0.5 to 15 at%, Si is 9 to 17 at%,
8β is 7 to 15 at%, N is 0.01 to 10 at%,
A soft magnetic thin film characterized by having a composition with the balance being Fe.

Claims (1)

[Claims] Co is 5 to 15 at%, Si is 9 to 17 at%, Al is 7 to 15 at%, N is 0.01 to 10 at%, balance is Fe.
A soft magnetic thin film characterized by having a composition.