JPS6292557U - - Google Patents
Info
- Publication number
- JPS6292557U JPS6292557U JP18517885U JP18517885U JPS6292557U JP S6292557 U JPS6292557 U JP S6292557U JP 18517885 U JP18517885 U JP 18517885U JP 18517885 U JP18517885 U JP 18517885U JP S6292557 U JPS6292557 U JP S6292557U
- Authority
- JP
- Japan
- Prior art keywords
- control
- system control
- controllers
- ion implanter
- man
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000008054 signal transmission Effects 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18517885U JPS6292557U (fr) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18517885U JPS6292557U (fr) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292557U true JPS6292557U (fr) | 1987-06-13 |
Family
ID=31133558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18517885U Pending JPS6292557U (fr) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292557U (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5993249A (ja) * | 1982-10-19 | 1984-05-29 | バリアン・アソシエイツ・インコ−ポレイテツド | 局部的真空処理のための間隙制御装置 |
| JPS6051044A (ja) * | 1983-08-30 | 1985-03-22 | Nissin Electric Co Ltd | ル−プ式伝送処理装置 |
-
1985
- 1985-11-29 JP JP18517885U patent/JPS6292557U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5993249A (ja) * | 1982-10-19 | 1984-05-29 | バリアン・アソシエイツ・インコ−ポレイテツド | 局部的真空処理のための間隙制御装置 |
| JPS6051044A (ja) * | 1983-08-30 | 1985-03-22 | Nissin Electric Co Ltd | ル−プ式伝送処理装置 |
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