JPS629727Y2 - - Google Patents

Info

Publication number
JPS629727Y2
JPS629727Y2 JP1985187565U JP18756585U JPS629727Y2 JP S629727 Y2 JPS629727 Y2 JP S629727Y2 JP 1985187565 U JP1985187565 U JP 1985187565U JP 18756585 U JP18756585 U JP 18756585U JP S629727 Y2 JPS629727 Y2 JP S629727Y2
Authority
JP
Japan
Prior art keywords
wafer
wafers
basket
storage container
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985187565U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6197842U (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985187565U priority Critical patent/JPS629727Y2/ja
Publication of JPS6197842U publication Critical patent/JPS6197842U/ja
Application granted granted Critical
Publication of JPS629727Y2 publication Critical patent/JPS629727Y2/ja
Expired legal-status Critical Current

Links

JP1985187565U 1985-12-05 1985-12-05 Expired JPS629727Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985187565U JPS629727Y2 (da) 1985-12-05 1985-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985187565U JPS629727Y2 (da) 1985-12-05 1985-12-05

Publications (2)

Publication Number Publication Date
JPS6197842U JPS6197842U (da) 1986-06-23
JPS629727Y2 true JPS629727Y2 (da) 1987-03-06

Family

ID=30745026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985187565U Expired JPS629727Y2 (da) 1985-12-05 1985-12-05

Country Status (1)

Country Link
JP (1) JPS629727Y2 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI663671B (zh) * 2015-04-30 2019-06-21 環球晶圓股份有限公司 晶圓轉換裝置及其晶圓轉換方法

Also Published As

Publication number Publication date
JPS6197842U (da) 1986-06-23

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