JPS6297380A - 磁気センサ - Google Patents

磁気センサ

Info

Publication number: JPS6297380A
Authority: JP; Japan
Prior art keywords: magnetic; magnetic resistance; width; sensor unit; resistance element
Prior art date: 1985-06-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP60132158A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0471352B2 (de

Inventor

Yukio Sekine

関根　幸夫

Makoto Fujita

誠藤田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sanyo Electric Co Ltd

Original Assignee

Sanyo Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-06-18

Filing date

1985-06-18

Publication date

1987-05-06

1985-06-18 Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd

1985-06-18 Priority to JP60132158A priority Critical patent/JPS6297380A/ja

1987-05-06 Publication of JPS6297380A publication Critical patent/JPS6297380A/ja

1992-11-13 Publication of JPH0471352B2 publication Critical patent/JPH0471352B2/ja

Status Granted legal-status Critical Current

Links

230000005291 magnetic effect Effects 0.000 title claims abstract description 57
239000000758 substrate Substances 0.000 claims abstract description 11
125000006850 spacer group Chemical group 0.000 abstract description 6
238000001514 detection method Methods 0.000 abstract 1
239000011347 resin Substances 0.000 abstract 1
229920005989 resin Polymers 0.000 abstract 1
239000000696 magnetic material Substances 0.000 description 7
230000004907 flux Effects 0.000 description 5
235000012431 wafers Nutrition 0.000 description 5
239000000976 ink Substances 0.000 description 4
238000010586 diagram Methods 0.000 description 3
229920002120 photoresistant polymer Polymers 0.000 description 3
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
239000004840 adhesive resin Substances 0.000 description 2
229920006223 adhesive resin Polymers 0.000 description 2
229910052802 copper Inorganic materials 0.000 description 2
239000010949 copper Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
239000002184 metal Substances 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
238000000034 method Methods 0.000 description 2
229920003002 synthetic resin Polymers 0.000 description 2
239000000057 synthetic resin Substances 0.000 description 2
229910000673 Indium arsenide Inorganic materials 0.000 description 1
229910017709 Ni Co Inorganic materials 0.000 description 1
229910003267 Ni-Co Inorganic materials 0.000 description 1
229910003262 Ni‐Co Inorganic materials 0.000 description 1
241001310793 Podium Species 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
238000013459 approach Methods 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
239000003086 colorant Substances 0.000 description 1
239000012141 concentrate Substances 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
230000005684 electric field Effects 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
239000003302 ferromagnetic material Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
230000005389 magnetism Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000005498 polishing Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000010959 steel Substances 0.000 description 1

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices

Landscapes

Hall/Mr Elements (AREA)

JP60132158A 1985-06-18 1985-06-18 磁気センサ Granted JPS6297380A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP60132158A JPS6297380A (ja)	1985-06-18	1985-06-18	磁気センサ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP60132158A JPS6297380A (ja)	1985-06-18	1985-06-18	磁気センサ

Publications (2)

Publication Number	Publication Date
JPS6297380A true JPS6297380A (ja)	1987-05-06
JPH0471352B2 JPH0471352B2 (de)	1992-11-13

Family

ID=15074716

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP60132158A Granted JPS6297380A (ja)	1985-06-18	1985-06-18	磁気センサ

Country Status (1)

Country	Link
JP (1)	JPS6297380A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH04252088A (ja) *	1991-01-28	1992-09-08	Nec Corp	磁気抵抗素子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5038477A (de) *	1973-08-07	1975-04-09

1985
- 1985-06-18 JP JP60132158A patent/JPS6297380A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5038477A (de) *	1973-08-07	1975-04-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH04252088A (ja) *	1991-01-28	1992-09-08	Nec Corp	磁気抵抗素子

Also Published As

Publication number	Publication date
JPH0471352B2 (de)	1992-11-13

Similar Documents

Publication	Publication Date	Title
KR100645291B1 (ko)	2006-11-13	자기 센서 및 그 제조방법
US6640652B2 (en)	2003-11-04	Rotation angle sensor capable of accurately detecting rotation angle
JP3210192B2 (ja)	2001-09-17	磁気検出素子
US8076930B2 (en)	2011-12-13	Thin film 3 axis fluxgate and the implementation method thereof
JP3206810B2 (ja)	2001-09-10	磁気検出装置
US6191581B1 (en)	2001-02-20	Planar thin-film magnetic field sensor for determining directional magnetic fields
JPH11513128A (ja)	1999-11-09	磁気抵抗ブリッジを有する磁場センサ
KR20020089317A (ko)	2002-11-29	박막자계센서
JP2004163419A (ja)	2004-06-10	磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ
US4712083A (en)	1987-12-08	Position sensor
JPH08178937A (ja)	1996-07-12	磁気検出装置
JP2015197388A (ja)	2015-11-09	フラックスゲート型磁気センサ
JP2001281313A (ja)	2001-10-10	磁界センサー、それを用いた磁気式エンコーダー、及び磁気ヘッド
US5564194A (en)	1996-10-15	Geomagnetic direction sensor
JP4541136B2 (ja)	2010-09-08	磁性体検出センサ及び磁性体検出ラインセンサ
JPH06111251A (ja)	1994-04-22	磁気センサ装置
JPH0471352B2 (de)	1992-11-13
JPS61289685A (ja)	1986-12-19	磁気センサ
JPS61290784A (ja)	1986-12-20	磁気センサ
JPS61287284A (ja)	1986-12-17	磁気センサ
JPH09231517A (ja)	1997-09-05	磁気抵抗センサ
JPH07297464A (ja)	1995-11-10	差動型磁気抵抗効果素子
JP2002071775A (ja)	2002-03-12	磁気センサ
JPS6051153B2 (ja)	1985-11-12	磁気カ−ド読取装置
JP2923959B2 (ja)	1999-07-26	磁気方位検出装置