JPS63102766U - - Google Patents
Info
- Publication number
- JPS63102766U JPS63102766U JP20409486U JP20409486U JPS63102766U JP S63102766 U JPS63102766 U JP S63102766U JP 20409486 U JP20409486 U JP 20409486U JP 20409486 U JP20409486 U JP 20409486U JP S63102766 U JPS63102766 U JP S63102766U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- cooling
- carbon
- liquid phase
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20409486U JPS63102766U (lt) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20409486U JPS63102766U (lt) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102766U true JPS63102766U (lt) | 1988-07-04 |
Family
ID=31170032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20409486U Pending JPS63102766U (lt) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102766U (lt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004003262A1 (ja) * | 2002-06-28 | 2004-01-08 | Sharp Kabushiki Kaisha | 薄板製造方法および薄板製造装置 |
-
1986
- 1986-12-24 JP JP20409486U patent/JPS63102766U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004003262A1 (ja) * | 2002-06-28 | 2004-01-08 | Sharp Kabushiki Kaisha | 薄板製造方法および薄板製造装置 |
| US7186578B2 (en) | 2002-06-28 | 2007-03-06 | Sharp Kabushiki Kaisha | Thin sheet production method and thin sheet production device |
| CN1324657C (zh) * | 2002-06-28 | 2007-07-04 | 夏普株式会社 | 薄板制造方法和薄板制造装置 |
| US7485477B2 (en) | 2002-06-28 | 2009-02-03 | Sharp Kabushiki Kaisha | Thin plate manufacturing method and thin plate manufacturing apparatus |
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