JPS6311605B2 - - Google Patents

Info

Publication number
JPS6311605B2
JPS6311605B2 JP56174233A JP17423381A JPS6311605B2 JP S6311605 B2 JPS6311605 B2 JP S6311605B2 JP 56174233 A JP56174233 A JP 56174233A JP 17423381 A JP17423381 A JP 17423381A JP S6311605 B2 JPS6311605 B2 JP S6311605B2
Authority
JP
Japan
Prior art keywords
reflective
reflective film
base material
scale
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56174233A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5875004A (ja
Inventor
Narikata Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MITSUTOYO KK
Original Assignee
MITSUTOYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MITSUTOYO KK filed Critical MITSUTOYO KK
Priority to JP17423381A priority Critical patent/JPS5875004A/ja
Publication of JPS5875004A publication Critical patent/JPS5875004A/ja
Publication of JPS6311605B2 publication Critical patent/JPS6311605B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Electroplating Methods And Accessories (AREA)
JP17423381A 1981-10-30 1981-10-30 光電式変位検出装置の反射型スケ−ルの製造方法 Granted JPS5875004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17423381A JPS5875004A (ja) 1981-10-30 1981-10-30 光電式変位検出装置の反射型スケ−ルの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17423381A JPS5875004A (ja) 1981-10-30 1981-10-30 光電式変位検出装置の反射型スケ−ルの製造方法

Publications (2)

Publication Number Publication Date
JPS5875004A JPS5875004A (ja) 1983-05-06
JPS6311605B2 true JPS6311605B2 (de) 1988-03-15

Family

ID=15975043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17423381A Granted JPS5875004A (ja) 1981-10-30 1981-10-30 光電式変位検出装置の反射型スケ−ルの製造方法

Country Status (1)

Country Link
JP (1) JPS5875004A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2597431A1 (de) 2011-11-22 2013-05-29 Mitutoyo Corporation Skala für einen photoelektrischen Codierer und Herstellungsverfahren dafür

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197510U (de) * 1985-05-31 1986-12-10
GB8616240D0 (en) * 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus
DE4303975A1 (de) * 1993-02-11 1994-08-18 Heidenhain Gmbh Dr Johannes Teilungsträger
DE10011872A1 (de) * 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
JP5239303B2 (ja) * 2007-11-14 2013-07-17 株式会社ニコン 磁気回転体の製造方法およびエンコーダ装置
JP5577975B2 (ja) * 2010-09-15 2014-08-27 株式会社ニコン 光学式エンコーダ用反射板、エンコーダ及び光学式エンコーダ用反射板の製造方法
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152410U (de) * 1980-04-09 1980-11-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2597431A1 (de) 2011-11-22 2013-05-29 Mitutoyo Corporation Skala für einen photoelektrischen Codierer und Herstellungsverfahren dafür

Also Published As

Publication number Publication date
JPS5875004A (ja) 1983-05-06

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