JPS63131335U - - Google Patents

Info

Publication number
JPS63131335U
JPS63131335U JP2253987U JP2253987U JPS63131335U JP S63131335 U JPS63131335 U JP S63131335U JP 2253987 U JP2253987 U JP 2253987U JP 2253987 U JP2253987 U JP 2253987U JP S63131335 U JPS63131335 U JP S63131335U
Authority
JP
Japan
Prior art keywords
moving body
guide
bearing
sandwich
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2253987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0540905Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2253987U priority Critical patent/JPH0540905Y2/ja
Publication of JPS63131335U publication Critical patent/JPS63131335U/ja
Application granted granted Critical
Publication of JPH0540905Y2 publication Critical patent/JPH0540905Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Electron Beam Exposure (AREA)
JP2253987U 1987-02-18 1987-02-18 Expired - Lifetime JPH0540905Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (fr) 1987-02-18 1987-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (fr) 1987-02-18 1987-02-18

Publications (2)

Publication Number Publication Date
JPS63131335U true JPS63131335U (fr) 1988-08-26
JPH0540905Y2 JPH0540905Y2 (fr) 1993-10-18

Family

ID=30820020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2253987U Expired - Lifetime JPH0540905Y2 (fr) 1987-02-18 1987-02-18

Country Status (1)

Country Link
JP (1) JPH0540905Y2 (fr)

Also Published As

Publication number Publication date
JPH0540905Y2 (fr) 1993-10-18

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