JPS63140630U - - Google Patents

Info

Publication number
JPS63140630U
JPS63140630U JP3257887U JP3257887U JPS63140630U JP S63140630 U JPS63140630 U JP S63140630U JP 3257887 U JP3257887 U JP 3257887U JP 3257887 U JP3257887 U JP 3257887U JP S63140630 U JPS63140630 U JP S63140630U
Authority
JP
Japan
Prior art keywords
gas sensor
organic solvent
solvent vapor
atmosphere
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3257887U
Other languages
English (en)
Other versions
JPH0713212Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032578U priority Critical patent/JPH0713212Y2/ja
Publication of JPS63140630U publication Critical patent/JPS63140630U/ja
Application granted granted Critical
Publication of JPH0713212Y2 publication Critical patent/JPH0713212Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は実施例の回路図、第２図は変形例の要
部回路図、第３図は更に他の変形例の要部回路図
である。第４図は他の実施例の回路図である。第
５図〜第７図はガスセンサの特性図である。 図において、８……検出室、１０……ガスセン
サ、３２……演算手段。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体の洗浄に伴つて発生する有機溶剤蒸気を
    、ガスセンサで検出するための装置において、 ガスセンサを収容した検出室と、 検出室に有機溶剤蒸気を含んだ被検雰囲気を導
    入するための、被検雰囲気導入手段と、 検出室に基準雰囲気を導入するための、基準雰
    囲気導入手段と、 被検雰囲気導入手段と基準雰囲気導入手段とを
    交互に作動させるための制御手段と、 基準雰囲気導入時のガスセンサの出力を記憶す
    るための基準値発生手段と、 被検雰囲気導入時のガスセンサの出力を、基準
    値発生手段の出力により補償して、有機溶剤蒸気
    を検出するための演算手段とを設けたことを特徴
    とする、半導体工業での有機溶剤蒸気の検出装置
    。
JP1987032578U 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置 Expired - Lifetime JPH0713212Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Publications (2)

Publication Number Publication Date
JPS63140630U true JPS63140630U (ja) 1988-09-16
JPH0713212Y2 JPH0713212Y2 (ja) 1995-03-29

Family

ID=30839390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032578U Expired - Lifetime JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Country Status (1)

Country Link
JP (1) JPH0713212Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752978A (en) * 1980-09-16 1982-03-29 Tamura Electric Works Ltd Card for recording information
JPS59230138A (ja) * 1983-06-11 1984-12-24 Horiba Ltd 有害ガス警報器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752978A (en) * 1980-09-16 1982-03-29 Tamura Electric Works Ltd Card for recording information
JPS59230138A (ja) * 1983-06-11 1984-12-24 Horiba Ltd 有害ガス警報器

Also Published As

Publication number Publication date
JPH0713212Y2 (ja) 1995-03-29

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