JPS63142823U - - Google Patents
Info
- Publication number
- JPS63142823U JPS63142823U JP1987035785U JP3578587U JPS63142823U JP S63142823 U JPS63142823 U JP S63142823U JP 1987035785 U JP1987035785 U JP 1987035785U JP 3578587 U JP3578587 U JP 3578587U JP S63142823 U JPS63142823 U JP S63142823U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- view port
- heating means
- rotation means
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035785U JPS63142823U (id) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035785U JPS63142823U (id) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142823U true JPS63142823U (id) | 1988-09-20 |
Family
ID=30845590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987035785U Pending JPS63142823U (id) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142823U (id) |
-
1987
- 1987-03-11 JP JP1987035785U patent/JPS63142823U/ja active Pending
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