JPS63143579U - - Google Patents

Info

Publication number
JPS63143579U
JPS63143579U JP3633787U JP3633787U JPS63143579U JP S63143579 U JPS63143579 U JP S63143579U JP 3633787 U JP3633787 U JP 3633787U JP 3633787 U JP3633787 U JP 3633787U JP S63143579 U JPS63143579 U JP S63143579U
Authority
JP
Japan
Prior art keywords
magnets
impurity
container
sealed tube
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3633787U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633787U priority Critical patent/JPS63143579U/ja
Publication of JPS63143579U publication Critical patent/JPS63143579U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係る不純物供給装置の一実
施例を示す構成図、第２図は従来の不純物供給手
段を示す構成図である。 １……反応管、２……スライダー、６……不純
物容器、７……押棒、１０……駆動部収納容器、
１１……磁石密封管、１２……小磁石、１３，１
４……滑動体、１３ａ，１４ａ……円板、１３ｂ
，１４ｂ……リング状部材、１５……小磁石、１
６……小台車、１７……レール、１８……駆動輪
付きリニアパルスモータ、１９……水平往復駆動
装置、２０……熱遮蔽板。

Claims (1)

    【実用新案登録請求の範囲】
  1. その先端に不純物容器を固定している押棒の他
    端部近傍に、内部に複数個の磁石を各々のＮＳ極
    を交互にして配置した磁石密封管を固定するとと
    もに、これら不純物容器付き押棒および磁石密封
    管を覆うようにして有底円筒体状の駆動装置収納
    容器を反応容器に気密に取り付け、この駆動装置
    収納容器の外部に前記磁石密封管内の磁石に対向
    して互いに反対極性を有する複数個の磁石を一体
    的かつ水平方向移動可能に設けるとともに、不純
    物容器が反応管の高温部に到達可能なように配置
    し、これら磁石を水平往復駆動装置に連結し、さ
    らに前記密封管の両側に前記収納容器内壁に滑接
    する滑動体を取り付けるとともに、前記不純物容
    器の成長炉側先端に熱遮蔽板を取り付けたことを
    特徴とする不純物供給装置。
JP3633787U 1987-03-12 1987-03-12 Pending JPS63143579U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633787U JPS63143579U (ja) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633787U JPS63143579U (ja) 1987-03-12 1987-03-12

Publications (1)

Publication Number Publication Date
JPS63143579U true JPS63143579U (ja) 1988-09-21

Family

ID=30846646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633787U Pending JPS63143579U (ja) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPS63143579U (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057174A (ja) * 1973-09-17 1975-05-19
JPS51142272A (en) * 1975-06-03 1976-12-07 Sanyo Electric Co Ltd Method of manufacturing a compound-semiconductor device having muti-la yer structure
JPS5227877U (ja) * 1975-08-16 1977-02-26
JPS5420314A (en) * 1977-07-14 1979-02-15 Mitsubishi Electric Corp Reduced speed motor
JPS57135037A (en) * 1981-02-13 1982-08-20 Hitachi Ltd Mechanism for introducing linear motion in vacuum

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057174A (ja) * 1973-09-17 1975-05-19
JPS51142272A (en) * 1975-06-03 1976-12-07 Sanyo Electric Co Ltd Method of manufacturing a compound-semiconductor device having muti-la yer structure
JPS5227877U (ja) * 1975-08-16 1977-02-26
JPS5420314A (en) * 1977-07-14 1979-02-15 Mitsubishi Electric Corp Reduced speed motor
JPS57135037A (en) * 1981-02-13 1982-08-20 Hitachi Ltd Mechanism for introducing linear motion in vacuum

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