JPS63149057U - - Google Patents
Info
- Publication number
- JPS63149057U JPS63149057U JP4056487U JP4056487U JPS63149057U JP S63149057 U JPS63149057 U JP S63149057U JP 4056487 U JP4056487 U JP 4056487U JP 4056487 U JP4056487 U JP 4056487U JP S63149057 U JPS63149057 U JP S63149057U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- electron beam
- holder
- anode holder
- exhaust hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、本考案に係る電子ビーム装置の主要
部の模式図、第２図は、本考案に係る電子ビーム
装置のアノードの水平断面図、第３図は、従来の
電子ビーム装置の主要部の側断面図、である。
図において、１……電子銃室、２……鏡筒室、
３……電子銃、４……アノード、４１……アノー
ド、４２……アノードホルダ、４１ａ……電子ビ
ーム通過孔、４１ｂ……排気孔、４２ａ……固定
排気孔、４３……アノード押さえ、５……イオン
ポンプ、６……調整手段、６１……アクチユエー
タ、６２……作動シヤフト、７……隔壁、をそれ
ぞれ表す。
FIG. 1 is a schematic diagram of the main parts of the electron beam device according to the present invention, FIG. 2 is a horizontal sectional view of the anode of the electron beam device according to the present invention, and FIG. 3 is the main part of the conventional electron beam device. FIG. In the figure, 1...electron gun chamber, 2...lens barrel chamber,
3...Electron gun, 4...Anode, 41...Anode, 42...Anode holder, 41a...Electron beam passing hole, 41b...Exhaust hole, 42a...Fixed exhaust hole, 43...Anode holder, 5 ... ion pump, 6 ... adjustment means, 61 ... actuator, 62 ... actuation shaft, 7 ... partition, respectively.
Claims (1)
過穴４１ａを備えたアノード４１により仕切られ
ている電子ビーム装置において、 円周部に前記電子ビーム通過穴４１ａより大面
積の固定排気孔４２ａを備えた略円筒状のアノー
ドホルダ４２と、 円周側面上の前記固定排気孔４２ａに対応する
位置に排気孔４１ｂを備え、前記アノードホルダ
４２と回動自在に嵌合し、且つアノード押さえ４
３により保持されるアノード４１と、 前記アノード押さえ４３を介して前記アノード
４１に回動動作を伝達する作動シヤフト６２と、
前記電子銃室１の外部に設けたアクチユエータ６
１とからなる調整手段６とを設けたことを特徴と
する電子ビーム装置。[Claims for Utility Model Registration] In an electron beam device in which an electron gun chamber 1 and a lens barrel chamber 2 are partitioned by an anode 41 having an electron beam passage hole 41a, the electron beam passage is provided in a circumferential portion of the electron beam device. A substantially cylindrical anode holder 42 is provided with a fixed exhaust hole 42a having a larger area than the hole 41a, and an exhaust hole 41b is provided at a position corresponding to the fixed exhaust hole 42a on the circumferential side surface, and the anode holder 42 rotates with the anode holder 42. Fits freely and anode holder 4
an anode 41 held by the anode 3; an actuating shaft 62 that transmits rotational movement to the anode 41 via the anode holder 43;
an actuator 6 provided outside the electron gun chamber 1;
1. An electron beam device characterized in that an adjusting means 6 consisting of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056487U JPH0546202Y2 (en) | 1987-03-19 | 1987-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056487U JPH0546202Y2 (en) | 1987-03-19 | 1987-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63149057U true JPS63149057U (en) | 1988-09-30 |
| JPH0546202Y2 JPH0546202Y2 (en) | 1993-12-02 |
Family
ID=30854762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4056487U Expired - Lifetime JPH0546202Y2 (en) | 1987-03-19 | 1987-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546202Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002358920A (en) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | Charged particle beam device |
-
1987
- 1987-03-19 JP JP4056487U patent/JPH0546202Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002358920A (en) * | 2001-06-01 | 2002-12-13 | Ulvac Japan Ltd | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546202Y2 (en) | 1993-12-02 |