JPS63154534U - - Google Patents

Info

Publication number
JPS63154534U
JPS63154534U JP1987046354U JP4635487U JPS63154534U JP S63154534 U JPS63154534 U JP S63154534U JP 1987046354 U JP1987046354 U JP 1987046354U JP 4635487 U JP4635487 U JP 4635487U JP S63154534 U JPS63154534 U JP S63154534U
Authority
JP
Japan
Prior art keywords
substrate
transport
processing
holding arm
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987046354U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987046354U priority Critical patent/JPS63154534U/ja
Publication of JPS63154534U publication Critical patent/JPS63154534U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図、第２図はこの考案の一実施例を示す斜
視図で、第１図は基板処理時、第２図は基板搬送
時を示す。第３図は従来例を示す斜視図である。 図中、１は処理装置、２はレチクル、３，４は
処理槽、７はレチクル保持アーム、８は連結板、
９は回転機構部である。尚、図中同一符号は同一
又は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板処理槽を有する処理装置に沿つて移動可能
    に配置され、処理すべき基板を保持して搬送する
    ための保持アームを備えた基板搬送装置において
    、上記基板の保持アームに回転機構部を連結し、
    処理時と搬送時とで基板の搬送姿勢を変えて搬送
    し得るようにしたことを特徴とする基板搬送装置
    。
JP1987046354U 1987-03-27 1987-03-27 Pending JPS63154534U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987046354U JPS63154534U (ja) 1987-03-27 1987-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987046354U JPS63154534U (ja) 1987-03-27 1987-03-27

Publications (1)

Publication Number Publication Date
JPS63154534U true JPS63154534U (ja) 1988-10-11

Family

ID=30865941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987046354U Pending JPS63154534U (ja) 1987-03-27 1987-03-27

Country Status (1)

Country Link
JP (1) JPS63154534U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018125567A (ja) * 2014-07-07 2018-08-09 株式会社荏原製作所 基板処理装置及び基板搬送方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018125567A (ja) * 2014-07-07 2018-08-09 株式会社荏原製作所 基板処理装置及び基板搬送方法

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