JPS63155997U - - Google Patents

Info

Publication number
JPS63155997U
JPS63155997U JP4724287U JP4724287U JPS63155997U JP S63155997 U JPS63155997 U JP S63155997U JP 4724287 U JP4724287 U JP 4724287U JP 4724287 U JP4724287 U JP 4724287U JP S63155997 U JPS63155997 U JP S63155997U
Authority
JP
Japan
Prior art keywords
support tube
detection device
displacement
temperature detection
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4724287U
Other languages
English (en)
Other versions
JPH058476Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4724287U priority Critical patent/JPH058476Y2/ja
Publication of JPS63155997U publication Critical patent/JPS63155997U/ja
Application granted granted Critical
Publication of JPH058476Y2 publication Critical patent/JPH058476Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B30B11/002—Isostatic press chambers; Press stands therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Powder Metallurgy (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Description

【図面の簡単な説明】
第１図は第１実施例を示す正断面図、第２図は
第１図のＡ―Ａ断面図、第３図は第１実施例の温
度検出装置の主要部正断面図、第４図は検出棒と
支持管との固着例を示す正断面図、第５図は歪ゲ
ージによる変位検出装置の側面図、第６図は第２
実施例の温度検出装置の主要部正断面図である。 １……高圧容器、２……断熱層、３……ヒータ
、４……処理室、５……支持管、６……検出棒、
７……差動トランス、８……温度変換器、９……
コイル、１０……金属板、１１……歪ゲージ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高圧容器１と、該高圧容器１の内側に配設され
    る断熱層２と、該断熱層２の内側に配設されるヒ
    ータ３と、該ヒータ３の内側に画成される処理室
    ４とを備えた熱間静水圧加圧装置において、前記
    処理室４内の温度を検出する温度検出装置であつ
    て、前記処理室４における被処理体が収容される
    空間から半径方向にたずれた位置に立設され、か
    つその下端が開口する耐熱性の支持管５と、該支
    持管５の上部に支持され、その下部が前記支持管
    ５の内側に遊嵌して下部開口部から突出すると共
    に、該支持管５と異材質の上部部分と該支持管５
    と同材質の下部部分とからなる検出棒６と、該検
    出棒６の下部突出部の対応位置に配置され、該突
    出部の変位量を検出する変位検出手段７と、前記
    高圧容器１の外方に配設され、前記変位検出手段
    ７で検出した変位信号を温度信号に変換する変換
    手段８とを含むことを特徴とする熱間静水圧加圧
    装置の温度検出装置。
JP4724287U 1987-03-30 1987-03-30 Expired - Lifetime JPH058476Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (ja) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (ja) 1987-03-30 1987-03-30

Publications (2)

Publication Number Publication Date
JPS63155997U true JPS63155997U (ja) 1988-10-13
JPH058476Y2 JPH058476Y2 (ja) 1993-03-03

Family

ID=30867663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4724287U Expired - Lifetime JPH058476Y2 (ja) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPH058476Y2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure

Also Published As

Publication number Publication date
JPH058476Y2 (ja) 1993-03-03

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