JPS63156591A - 超純水の製造法 - Google Patents

超純水の製造法

Info

Publication number
JPS63156591A
JPS63156591A JP8760387A JP8760387A JPS63156591A JP S63156591 A JPS63156591 A JP S63156591A JP 8760387 A JP8760387 A JP 8760387A JP 8760387 A JP8760387 A JP 8760387A JP S63156591 A JPS63156591 A JP S63156591A
Authority
JP
Japan
Prior art keywords
water
ion exchange
activated carbon
fibers
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8760387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0310388B2 (2
Inventor
Nami Kubo
久保　奈美
Toshio Yoshioka
敏雄 吉岡
Masaru Noyori
野寄　賢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of JPS63156591A publication Critical patent/JPS63156591A/ja
Publication of JPH0310388B2 publication Critical patent/JPH0310388B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Ion Exchange (AREA)
  • Water Treatment By Sorption (AREA)
JP8760387A 1986-08-28 1987-04-09 超純水の製造法 Granted JPS63156591A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20256586 1986-08-28
JP61-202565 1986-08-28

Publications (2)

Publication Number Publication Date
JPS63156591A true JPS63156591A (ja) 1988-06-29
JPH0310388B2 JPH0310388B2 (2) 1991-02-13

Family

ID=16459598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8760387A Granted JPS63156591A (ja) 1986-08-28 1987-04-09 超純水の製造法

Country Status (1)

Country Link
JP (1) JPS63156591A (2)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126990A (ja) * 1988-07-05 1990-05-15 Toray Ind Inc 超純水の製造方法
JPH0343396U (2) * 1989-09-04 1991-04-23
US5378802A (en) * 1991-09-03 1995-01-03 Ocg Microelectronic Materials, Inc. Method for removing impurities from resist components and novolak resins
JP2013255864A (ja) * 2012-06-11 2013-12-26 Nomura Micro Sci Co Ltd 純水製造装置
WO2018146310A1 (en) * 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water
WO2018146309A1 (en) * 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water
US11629071B2 (en) 2017-02-13 2023-04-18 Merck Patent Gmbh Method for producing ultrapure water
US11820676B2 (en) 2017-02-13 2023-11-21 Merck Patent Gmbh Method for producing ultrapure water

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126990A (ja) * 1988-07-05 1990-05-15 Toray Ind Inc 超純水の製造方法
JPH0343396U (2) * 1989-09-04 1991-04-23
US5378802A (en) * 1991-09-03 1995-01-03 Ocg Microelectronic Materials, Inc. Method for removing impurities from resist components and novolak resins
JP2013255864A (ja) * 2012-06-11 2013-12-26 Nomura Micro Sci Co Ltd 純水製造装置
WO2018146310A1 (en) * 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water
WO2018146309A1 (en) * 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water
CN110248899A (zh) * 2017-02-13 2019-09-17 默克专利股份公司 用于生产超纯水的方法
CN110300735A (zh) * 2017-02-13 2019-10-01 默克专利股份公司 用于生产超纯水的方法
JP2020507466A (ja) * 2017-02-13 2020-03-12 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ 超純水を製造するための方法
JP2020507462A (ja) * 2017-02-13 2020-03-12 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ 超純水を製造するための方法
US11629071B2 (en) 2017-02-13 2023-04-18 Merck Patent Gmbh Method for producing ultrapure water
US11807556B2 (en) 2017-02-13 2023-11-07 Merck Patent Gmbh Method for producing ultrapure water
US11820676B2 (en) 2017-02-13 2023-11-21 Merck Patent Gmbh Method for producing ultrapure water

Also Published As

Publication number Publication date
JPH0310388B2 (2) 1991-02-13

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