JPS63183261U - - Google Patents

Info

Publication number
JPS63183261U
JPS63183261U JP7423887U JP7423887U JPS63183261U JP S63183261 U JPS63183261 U JP S63183261U JP 7423887 U JP7423887 U JP 7423887U JP 7423887 U JP7423887 U JP 7423887U JP S63183261 U JPS63183261 U JP S63183261U
Authority
JP
Japan
Prior art keywords
sputtering device
bonding
magnetron sputtering
plate
backing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7423887U
Other languages
English (en)
Other versions
JPH0516215Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7423887U priority Critical patent/JPH0516215Y2/ja
Publication of JPS63183261U publication Critical patent/JPS63183261U/ja
Application granted granted Critical
Publication of JPH0516215Y2 publication Critical patent/JPH0516215Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る取付け構造を適用したス
パツタ装置の全体図、第２図は同装置の要部拡大
図、第３図はボンデイングプレートの取付け部を
示す斜視図、第４図は従来のスパツタ装置の要部
拡大図である。 尚、図面中１はチヤンバー、５は基板、６はタ
ーゲツト、８はカソードボツクス、１０はバツキ
ングプレート、１１はマグネツト、１４はボンデ
イングプレートである。

Claims (1)

    【実用新案登録請求の範囲】
  1. バツキングプレート下方にプラズマ収束用磁界
    発生コイルを配置したマグネトロンスパツタ装置
    において、前記バツキングプレート上にボンデイ
    ングプレートを位置調整可能に取付け、このボン
    デイングプレート上にボンデイング剤を介してタ
    ーゲツトを接着したことを特徴とするマグネトロ
    ンスパツタ装置におけるターゲツト取付け構造。
JP7423887U 1987-05-18 1987-05-18 Expired - Lifetime JPH0516215Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7423887U JPH0516215Y2 (ja) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7423887U JPH0516215Y2 (ja) 1987-05-18 1987-05-18

Publications (2)

Publication Number Publication Date
JPS63183261U true JPS63183261U (ja) 1988-11-25
JPH0516215Y2 JPH0516215Y2 (ja) 1993-04-28

Family

ID=30919268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7423887U Expired - Lifetime JPH0516215Y2 (ja) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPH0516215Y2 (ja)

Also Published As

Publication number Publication date
JPH0516215Y2 (ja) 1993-04-28

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