JPS63195568U - - Google Patents

Info

Publication number
JPS63195568U
JPS63195568U JP8322787U JP8322787U JPS63195568U JP S63195568 U JPS63195568 U JP S63195568U JP 8322787 U JP8322787 U JP 8322787U JP 8322787 U JP8322787 U JP 8322787U JP S63195568 U JPS63195568 U JP S63195568U
Authority
JP
Japan
Prior art keywords
target
temperature
sputtering
cooling system
reactive sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8322787U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8322787U priority Critical patent/JPS63195568U/ja
Publication of JPS63195568U publication Critical patent/JPS63195568U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の一実施例の反応性スパツタ装
置の構成図、第２図は異なるターゲツト温度での
スパツタ中の電力―電圧の関係を示した線図であ
る。 １……真空槽、２……スパツタターゲツト、３
……基板、４……熱電対温度計、５……ターゲツ
ト冷却系、６……ガス供給系、７……排気系、８
……冷媒だめ、９……冷媒用温度制御装置、１０
……冷媒循環用ポンプ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空槽、排気装置、ガス供給系、高電圧電源、
    スパツタゲートおよびターゲツト冷却系より成る
    反応性スパツタ装置において、スパツタターゲツ
    トに温度検出器をとりつけ、ターゲツト冷却系の
    冷媒の温度を制御することにより、ターゲツト温
    度を任意に設定できるようにしたことを特徴とす
    る反応性スパツタ装置。
JP8322787U 1987-06-01 1987-06-01 Pending JPS63195568U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8322787U JPS63195568U (ja) 1987-06-01 1987-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8322787U JPS63195568U (ja) 1987-06-01 1987-06-01

Publications (1)

Publication Number Publication Date
JPS63195568U true JPS63195568U (ja) 1988-12-15

Family

ID=30936621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8322787U Pending JPS63195568U (ja) 1987-06-01 1987-06-01

Country Status (1)

Country Link
JP (1) JPS63195568U (ja)

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