JPS6447033U - - Google Patents

Info

Publication number
JPS6447033U
JPS6447033U JP14202987U JP14202987U JPS6447033U JP S6447033 U JPS6447033 U JP S6447033U JP 14202987 U JP14202987 U JP 14202987U JP 14202987 U JP14202987 U JP 14202987U JP S6447033 U JPS6447033 U JP S6447033U
Authority
JP
Japan
Prior art keywords
temperature
stage
semiconductor wafer
low
wafer mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14202987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14202987U priority Critical patent/JPS6447033U/ja
Publication of JPS6447033U publication Critical patent/JPS6447033U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す構成図、第２
図は第１図の適用例を示す構成図、第３図は温度
制御図、第４図は従来のドライエツチング装置を
示す構成図である。 １…半導体ウエハー、２…半導体ウエハー載置
ステージ、３…高温用恒温循環器、４…低温用恒
温循環器、５…温度計、６…対向電極、７…真空
チヤンバ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハー載置ステージ部に高温用媒体を
    循環させて該ステージ部を加熱する高温用恒温循
    環部と、半導体ウエハー載置ステージに低温用媒
    体を循環させて該ステージ部を冷却する低温用恒
    温循環器部と、バルブの開閉を制御して高温用或
    いは低温用恒温循環器により半導体ウエハー載置
    ステージの加熱と冷却を行う制御部とを有するこ
    とを特徴とするドライエツチング装置。
JP14202987U 1987-09-17 1987-09-17 Pending JPS6447033U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14202987U JPS6447033U (ja) 1987-09-17 1987-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14202987U JPS6447033U (ja) 1987-09-17 1987-09-17

Publications (1)

Publication Number Publication Date
JPS6447033U true JPS6447033U (ja) 1989-03-23

Family

ID=31407618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14202987U Pending JPS6447033U (ja) 1987-09-17 1987-09-17

Country Status (1)

Country Link
JP (1) JPS6447033U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169824A (ja) * 1993-12-13 1995-07-04 Anelva Corp 基板加熱・冷却機構
JP2002353298A (ja) * 2001-05-23 2002-12-06 Tokyo Electron Ltd 載置装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169824A (ja) * 1993-12-13 1995-07-04 Anelva Corp 基板加熱・冷却機構
JP2002353298A (ja) * 2001-05-23 2002-12-06 Tokyo Electron Ltd 載置装置

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