JPS63195571U - - Google Patents
Info
- Publication number
- JPS63195571U JPS63195571U JP8671987U JP8671987U JPS63195571U JP S63195571 U JPS63195571 U JP S63195571U JP 8671987 U JP8671987 U JP 8671987U JP 8671987 U JP8671987 U JP 8671987U JP S63195571 U JPS63195571 U JP S63195571U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- tip
- raw material
- face
- central axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案にかかわる多結晶シリコンロツ
ドを示す図、第２図はシリコン単結晶中における
結晶成長方向と不純物濃度との関係を示す図であ
る。
ドを示す図、第２図はシリコン単結晶中における
結晶成長方向と不純物濃度との関係を示す図であ
る。
Claims (1)
- 単結晶シリコン引上げ原料用の多結晶シリコン
ロツドであつて、先端部端面をロツド中心軸に対
して傾斜させてなることを特徴とする多結晶シリ
コンロツド。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8671987U JPS63195571U (ja) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8671987U JPS63195571U (ja) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195571U true JPS63195571U (ja) | 1988-12-15 |
Family
ID=30943289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8671987U Pending JPS63195571U (ja) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195571U (ja) |
-
1987
- 1987-06-05 JP JP8671987U patent/JPS63195571U/ja active Pending