JPS6279883U - - Google Patents
Info
- Publication number
- JPS6279883U JPS6279883U JP17008685U JP17008685U JPS6279883U JP S6279883 U JPS6279883 U JP S6279883U JP 17008685 U JP17008685 U JP 17008685U JP 17008685 U JP17008685 U JP 17008685U JP S6279883 U JPS6279883 U JP S6279883U
- Authority
- JP
- Japan
- Prior art keywords
- monitoring window
- crystal
- quartz rod
- facing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の石英ロツドの概略図、第２図
は従来の石英ロツドの概略図、第３図は高圧結晶
成長装置の概略断面図である。 １……上軸シヤフト、２……テレビカメラ、３
……育成監視用窓、４……石英ロツド、５……チ
ヤンバー、６……種結晶、７……育成結晶、８…
…保温筒、９……ヒーター、１０……封止剤（酸
化硼素）、１１……サセプター、１２……坩堝、
１３……ＧａＡｓ融液、１４……電極、１５……
ヒーター。
は従来の石英ロツドの概略図、第３図は高圧結晶
成長装置の概略断面図である。 １……上軸シヤフト、２……テレビカメラ、３
……育成監視用窓、４……石英ロツド、５……チ
ヤンバー、６……種結晶、７……育成結晶、８…
…保温筒、９……ヒーター、１０……封止剤（酸
化硼素）、１１……サセプター、１２……坩堝、
１３……ＧａＡｓ融液、１４……電極、１５……
ヒーター。
Claims (1)
- チヤンバの結晶育成監視窓に一端を臨ませ、育
成中の結晶に向けられた他端面の面積を前記監視
窓の開口面積より大きくした透明な石英ロツドを
有することを特徴とする単結晶引上げ装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17008685U JPS6279883U (ja) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17008685U JPS6279883U (ja) | 1985-11-05 | 1985-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279883U true JPS6279883U (ja) | 1987-05-21 |
Family
ID=31104491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17008685U Pending JPS6279883U (ja) | 1985-11-05 | 1985-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279883U (ja) |
-
1985
- 1985-11-05 JP JP17008685U patent/JPS6279883U/ja active Pending
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