JPS6322738U - - Google Patents

Info

Publication number
JPS6322738U
JPS6322738U JP11609586U JP11609586U JPS6322738U JP S6322738 U JPS6322738 U JP S6322738U JP 11609586 U JP11609586 U JP 11609586U JP 11609586 U JP11609586 U JP 11609586U JP S6322738 U JPS6322738 U JP S6322738U
Authority
JP
Japan
Prior art keywords
wafers
feed
cassette
tray
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11609586U
Other languages
English (en)
Other versions
JPH0333062Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986116095U priority Critical patent/JPH0333062Y2/ja
Publication of JPS6322738U publication Critical patent/JPS6322738U/ja
Application granted granted Critical
Publication of JPH0333062Y2 publication Critical patent/JPH0333062Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の収容部の構成を示す説明図、
第２図は従来技術の説明図、第３図はインスペク
シヨントレーの断面図、第４図はその平面図。 １：ウエハ、２：搬送ベルト、３：ウエハ送り
込み機構、４：カセツト、５：インスペクシヨン
トレー、６：カバー。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハ上の半導体チツプを検査するプロービン
    グマシンのウエハをカセツトに収容する装置にお
    いて、カセツトの上部に設けられたインスペクシ
    ヨントレーと、カセツトの棚及びトレーの位置を
    選択的に移動可能でウエハを送り込むウエハ送込
    装置機構と、指令により搬送されてくる検査済ウ
    エハを上記のトレーに選択的に送り込み、かつイ
    ンスペクシヨン済のウエハをそのウエハの収容さ
    れるべきカセツトの棚に送り込むように作動制御
    を行なう電気装置とにより構成されるウエハの抜
    取装置。
JP1986116095U 1986-07-28 1986-07-28 Expired JPH0333062Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986116095U JPH0333062Y2 (ja) 1986-07-28 1986-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986116095U JPH0333062Y2 (ja) 1986-07-28 1986-07-28

Publications (2)

Publication Number Publication Date
JPS6322738U true JPS6322738U (ja) 1988-02-15
JPH0333062Y2 JPH0333062Y2 (ja) 1991-07-12

Family

ID=31000365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986116095U Expired JPH0333062Y2 (ja) 1986-07-28 1986-07-28

Country Status (1)

Country Link
JP (1) JPH0333062Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280434A (ja) * 1987-05-12 1988-11-17 Tokyo Electron Ltd ウエハプロ−バ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63280434A (ja) * 1987-05-12 1988-11-17 Tokyo Electron Ltd ウエハプロ−バ

Also Published As

Publication number Publication date
JPH0333062Y2 (ja) 1991-07-12

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