JPS63270389A - 分子線結晶成長装置の処理方法 - Google Patents

分子線結晶成長装置の処理方法

Info

Publication number
JPS63270389A
JPS63270389A JP62106046A JP10604687A JPS63270389A JP S63270389 A JPS63270389 A JP S63270389A JP 62106046 A JP62106046 A JP 62106046A JP 10604687 A JP10604687 A JP 10604687A JP S63270389 A JPS63270389 A JP S63270389A
Authority
JP
Japan
Prior art keywords
crystal growth
growth chamber
chamber
molecular beam
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62106046A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457638B2 (de
Inventor
Junji Saito
淳二 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62106046A priority Critical patent/JPS63270389A/ja
Publication of JPS63270389A publication Critical patent/JPS63270389A/ja
Publication of JPH0457638B2 publication Critical patent/JPH0457638B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP62106046A 1987-04-28 1987-04-28 分子線結晶成長装置の処理方法 Granted JPS63270389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62106046A JPS63270389A (ja) 1987-04-28 1987-04-28 分子線結晶成長装置の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62106046A JPS63270389A (ja) 1987-04-28 1987-04-28 分子線結晶成長装置の処理方法

Publications (2)

Publication Number Publication Date
JPS63270389A true JPS63270389A (ja) 1988-11-08
JPH0457638B2 JPH0457638B2 (de) 1992-09-14

Family

ID=14423690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62106046A Granted JPS63270389A (ja) 1987-04-28 1987-04-28 分子線結晶成長装置の処理方法

Country Status (1)

Country Link
JP (1) JPS63270389A (de)

Also Published As

Publication number Publication date
JPH0457638B2 (de) 1992-09-14

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