JPS63282945A - Thermomagneto-optical recording medium - Google Patents
Thermomagneto-optical recording mediumInfo
- Publication number
- JPS63282945A JPS63282945A JP11977787A JP11977787A JPS63282945A JP S63282945 A JPS63282945 A JP S63282945A JP 11977787 A JP11977787 A JP 11977787A JP 11977787 A JP11977787 A JP 11977787A JP S63282945 A JPS63282945 A JP S63282945A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording medium
- reproduction output
- substrate
- increases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、例えば光磁気メモリ、磁気記録、表示素子
などに用いられる光熱磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magneto-optical recording medium used for, for example, magneto-optical memory, magnetic recording, display elements, etc.
従来、光熱磁気記録媒体としては、MnB1 、 Mn
CuB1などの多結晶体薄膜、GdCo 、GdFe
、 TbFe%DyFe。Conventionally, as photothermal magnetic recording media, MnB1, Mn
Polycrystalline thin film such as CuB1, GdCo, GdFe
, TbFe%DyFe.
GdTbFe 、 TbDyFeなどの非晶質薄膜、G
IGなどの単結晶薄膜などが知られている。これらの薄
膜のうち、大面積の薄膜を室温近傍の温度で製作する製
膜性、信号を小さな光熱エネル千−で書込むための書込
み効率、書込まれた信号をSN比よく読出すための読出
し効率などの点から、最近では上記の非晶質薄膜が優れ
ていると考えられている。Amorphous thin films such as GdTbFe and TbDyFe, G
Single crystal thin films such as IG are known. Among these thin films, the film-forming ability of producing a large-area thin film at a temperature near room temperature, the writing efficiency of writing signals with a small amount of photothermal energy, and the ability to read the written signals with a good signal-to-noise ratio are important. Recently, the above-mentioned amorphous thin film is considered to be superior in terms of readout efficiency and the like.
しかしながら、これらの非晶質薄膜においても種々の欠
点が指摘されている。例えば、GdFeは保磁力が小さ
く、記録された情報が不安定である。However, various drawbacks have been pointed out even in these amorphous thin films. For example, GdFe has a small coercive force and recorded information is unstable.
また、GdFe 、 GdCoは磁気的補償点を利用し
た書込みを行なってお)、書込み効率を均一にするため
に、製膜の際、膜組成を厳しく管理しなければならない
という問題点がある。また、TbFe 、 DyFe、
TbDyF eは士ユーり点書込みのため、膜組成をそ
れほど激しく管理する必要はないが、+ユリ一点が10
0℃前後と低いために、信号を読出す時にパワーの強い
光を用いることができないという問題点がある。+ユリ
一温度は低ければ書込み効率は向上するが、書込まれた
信号が、周囲の温度とか読出し光によシ乱されてしまう
。従って牛ユリ一温度は、書込み可能であれば高い程よ
く、実用上の状態を考慮すれば200°C前後が望まし
い。Furthermore, since GdFe and GdCo perform writing using magnetic compensation points), there is a problem in that the film composition must be strictly controlled during film formation in order to make the writing efficiency uniform. In addition, TbFe, DyFe,
Since TbDyF e writes a single point, it is not necessary to control the film composition so severely, but one point of + Yuri is 10
Since the temperature is as low as around 0.degree. C., there is a problem in that high-power light cannot be used when reading signals. If the temperature is lower, the writing efficiency will improve, but the written signal will be disturbed by the ambient temperature or read light. Therefore, the higher the temperature of the cow lily is, the better, as long as it is writable, and considering practical conditions, around 200°C is desirable.
また、反射光による読出しSN比は、反射率をRカー回
転角をθにとすると、Jπθkに比例する。従って、
SN比よく読出すためには、カー回転角を大きくすれば
よい。そのため、TbFeCo、 DyFeCoといっ
たCOを添加したものが、例えば特開昭58−7374
6号公報に報告されている。Further, the readout S/N ratio by reflected light is proportional to Jπθk, where the reflectance and R Kerr rotation angle are θ. Therefore,
In order to read with a good signal-to-noise ratio, the Kerr rotation angle may be increased. Therefore, CO-added materials such as TbFeCo and DyFeCo are used, for example, in JP-A-58-7374.
It is reported in Publication No. 6.
TbFaCo膜は、牛ユリ一温度が200 ’C前後で
望ましく、カー回転角も大きく、SN比よく読み出すこ
とができる。しかしこのTbFeCo膜においてもカー
回転角、+ユリ一温度は組成に依存しておシ、最大のカ
ー回転角を得る念めにはTb量は少ない方がよい。しか
しTb量が少ない場合、飽和磁化(M8)の温度依存性
のためN(ノイズ)レベルが上昇し、SN比が低下する
という欠点がある。そのためTb量が22〜35 it
%程度のTbFeCo膜が適当であった。又C。The TbFaCo film is preferably used at a temperature of about 200'C, has a large Kerr rotation angle, and can be read with a good signal-to-noise ratio. However, even in this TbFeCo film, the Kerr rotation angle and temperature depend on the composition, and in order to obtain the maximum Kerr rotation angle, it is better to have a small amount of Tb. However, when the amount of Tb is small, there is a drawback that the N (noise) level increases due to the temperature dependence of saturation magnetization (M8), and the S/N ratio decreases. Therefore, the amount of Tb is 22 to 35 it
% TbFeCo film was suitable. Also C.
量を多くしていくにつれカー回転角は大きくなるが、牛
ユリ一温度が上昇し、書き込みに大きなエネル甲−を必
要とする欠点がある。As the amount increases, the Kerr rotation angle increases, but the disadvantage is that the temperature of the lily increases and a large amount of energy is required for writing.
この発明は、かかる問題点を解決するためになされたも
ので、得られる最大のカー回転角を有効に利用して効率
よく光再生出力をとシ出し得る光熱磁気記録媒体を提供
するものである。The present invention has been made to solve these problems, and provides a photothermal magnetic recording medium that can efficiently produce optical reproduction output by effectively utilizing the maximum obtainable Kerr rotation angle. .
この発明の光熱磁気記録媒体は、膜面に垂直方向に磁化
容易軸を有し、一般式Tbx (Fe1−y Coy
)1−xで示されるTb−F・−Co三元系非晶質磁性
合金層を基板に設けるものにおいて、上記磁性層を0.
15<X≦0.35.0 < y < 0.5の範囲で
、光の入射面から順次Xが増加し、yが減少するように
積層したものである。The photothermal magnetic recording medium of the present invention has an axis of easy magnetization perpendicular to the film surface, and has a general formula Tbx (Fe1-y Coy
) A Tb-F.-Co ternary amorphous magnetic alloy layer represented by 1-x is provided on the substrate, and the magnetic layer is 0.
The layers are stacked so that X increases and y decreases sequentially from the light incident surface within the range of 15<X≦0.35.0<y<0.5.
この発明における光熱磁気記録媒体は、膜の深さ方向に
組成を順次変化させたことによシ、光が入射する面にT
b量が少な(Co量が多くなシ、得られる最大のカー回
転角を有する膜が存在し、大きなシグナルレベルが得ら
れる。また、膜の底面ではTb量が多く、Co量が少な
くなるので、ノイズレベルの上昇をおさえることができ
る。そのため、書きこみ感度もよく、効率よく光再生出
力をとシ出し得ることができるようになる。The photothermal magnetic recording medium according to the present invention has a T
If the amount of b is small (the amount of cobalt is large), there is a film with the maximum Kerr rotation angle that can be obtained, and a large signal level can be obtained. , an increase in the noise level can be suppressed.Therefore, the writing sensitivity is also good, and the optical reproduction output can be efficiently output.
第1図はこの発明の一実施例の光熱磁気記録媒体の断面
図であり、(1)は基板、(2)は深さ方向に順次組成
を変化させたTb−Fe−Co三元系非晶質磁性合金層
である。基板(1)としては、プラスチックス、ガラス
、tラミックス等の非磁性体が材料として用いられる。FIG. 1 is a cross-sectional view of a photothermal magnetic recording medium according to an embodiment of the present invention, in which (1) is a substrate, and (2) is a Tb-Fe-Co ternary non-containing material whose composition is sequentially changed in the depth direction. It is a crystalline magnetic alloy layer. For the substrate (1), non-magnetic materials such as plastics, glass, and T-lamics are used as materials.
Tb −Fe−Co三元系非晶質磁性層[21tiTb
x(Fel −y Coy ) 1−1としたときXが
0.15≦x≦0.35の範囲で、yが0 (y <
0.500節囲範囲シ基板側から光を入射して記録・再
生を行なう場合は、基板側の膜面から深さ方向に順次X
が増加し、yが減少している層である。Tb -Fe-Co ternary amorphous magnetic layer [21tiTb
When x (Fel −y Coy ) 1-1, in the range of 0.15≦x≦0.35, y is 0 (y <
0.500 node range When recording and reproducing by entering light from the substrate side, X
In this layer, y increases and y decreases.
この層の作成方法としては、例えばスパッタリンク法や
真空蒸着法などがある。スパッタリンク法の場合Tb、
Fe 、 Co、それぞれの単一金属ターゲットに投
入する電力を順次変化させてやることにより、組成を膜
厚方向に変化させる。又、上記磁性合金層を構成する順
次組成の変化する隣接した層間は、交換結合されている
と思われる。Examples of methods for forming this layer include a sputter link method and a vacuum evaporation method. In the case of sputter link method, Tb,
By sequentially changing the power input to each of the single metal targets of Fe and Co, the composition is changed in the film thickness direction. Further, it is thought that exchange coupling occurs between adjacent layers constituting the magnetic alloy layer, the composition of which changes sequentially.
以下、この発明を実施例によシ具体的に説明する。Hereinafter, the present invention will be specifically explained using examples.
実施例
基板: 1.2+im厚溝付きプラスチック基板Tb−
F e−Co三元系非晶質磁性合金層:膜厚 1000
’A基板側の膜面の組成 Tb1a、a(Fe7oC
o3o)sx、+膜の底面の組成 Tb33 (F
ee、C015) 67上記構成の第1図に示すこの発
明の一実施例の光熱磁気記録媒体を得た。Example board: 1.2+im thick grooved plastic board Tb-
Fe-Co ternary amorphous magnetic alloy layer: thickness 1000
' Composition of the film surface on the A substrate side Tb1a, a (Fe7oC
o3o) sx, + Composition of the bottom surface of the membrane Tb33 (F
ee, C015) 67 A photothermal magnetic recording medium according to an embodiment of the present invention shown in FIG. 1 having the above structure was obtained.
第2図は、上記この発明の一実施例の光熱磁気記録媒体
に係わるTb−F e−Co三元系非晶質磁性層を、オ
ージェ電子分光分析装置によシ分析して得られた、光の
入射面からの膜厚内による各組成元素の変化(a十%)
を示す特性図であシ、図において、(3)はTb、(4
)はFe、(5)はCoの特性である。FIG. 2 shows the results obtained by analyzing the Tb-Fe-Co ternary amorphous magnetic layer of the photothermal magnetic recording medium according to the embodiment of the present invention using an Auger electron spectrometer. Changes in each compositional element within the film thickness from the light incident surface (a 10%)
In the figure, (3) is Tb, (4
) is the characteristic of Fe, and (5) is the characteristic of Co.
次に、上記この発明の一実施例の光熱磁気記録媒体につ
いて、光再生出力を測定した。ディスクスピードは9.
8m/s 、記録周波数IME(、である。膜厚方向に
、組成の一定なTbF eCo三元系非晶質磁性合金層
を用いた記録媒体と比較すると、SN比は5dB大きい
ことが示された。Next, the optical reproduction output of the photothermal magnetic recording medium according to the embodiment of the present invention was measured. Disk speed is 9.
8 m/s, recording frequency IME (,.Compared with a recording medium using a TbFeCo ternary amorphous magnetic alloy layer with a constant composition in the film thickness direction, the S/N ratio is 5 dB higher. Ta.
なお、上記実施例ではプラスチック基板に直接磁性層を
設けたものを示したがプラスチック基板上にSi3N4
膜などの誘電体膜を設けた後この発明に係わる膜厚方向
に組成を変化させたものを設け、最後に保護膜を成膜し
た記録媒体においても大きなSN比が得られている。In addition, in the above example, the magnetic layer was provided directly on the plastic substrate, but Si3N4 was provided on the plastic substrate.
A large S/N ratio is also obtained in a recording medium in which a dielectric film such as a dielectric film is provided, the composition of which is varied in the film thickness direction according to the present invention, and a protective film is finally formed.
また、実施例においては組成を連続的に変化させたが、
組成の変化をステップ伏(階段状)に変化させても、E
記実施例と同様の効果を奏する。In addition, although the composition was continuously changed in the examples,
Even if the composition changes in a stepwise manner, E
The same effects as in the embodiment described above are achieved.
第3図は、この発明の他の実施例の光熱磁気記録媒体の
断面図であ)、図において、 (2m)〜(2j)は磁
性層であり、Tbx(F@1−yCoy) l−xとし
たとき、(2a)はX=18.7=30、(2b)はX
=19.5.7=28、(2c)は!=21.y=26
、(2d)itx=22.5 、7=24、(2e)は
!=24.y=22、(2f)はx=25.5.7=2
0. (2g)はX−27,7=18、(2h)は!=
28.5.7=16、(21)はX=30゜7=14、
(2j)けx=31.5+y=12である。FIG. 3 is a cross-sectional view of a photothermal magnetic recording medium according to another embodiment of the present invention). In the figure, (2m) to (2j) are magnetic layers, and Tbx(F@1-yCoy) l- When x, (2a) is X=18.7=30, (2b) is
=19.5.7=28, (2c) is! =21. y=26
, (2d) itx=22.5, 7=24, (2e) is! =24. y=22, (2f) is x=25.5.7=2
0. (2g) is X-27,7=18, (2h) is! =
28.5.7=16, (21) is X=30°7=14,
(2j) x=31.5+y=12.
以上説明したとお)、この発明は、膜面に垂直方向に磁
化容易軸を有し、一般式Tbx(Fel−yCoy)l
−xで示されるTbFeCo三元糸非晶三元性非晶質磁
性合金層けるものにおいて、上記磁性合金層を0.15
<X<0.35.0 (y(0,5の範囲で、光の入射
面から順次Xが増加し、yが減少するように積層したも
のを用いることによシ、“得られる最大のカー回転角を
有効に利用して効率良く光再生出力をとシ出し得る光熱
磁気記録媒体を得ることができる。As explained above), this invention has an axis of easy magnetization perpendicular to the film surface, and has a general formula Tbx(Fel-yCoy)l
In the case where the TbFeCo ternary thread amorphous ternary amorphous magnetic alloy layer is represented by -x, the magnetic alloy layer is
<X<0.35.0 (y (in the range of 0.5, by using stacked layers such that X increases sequentially and y decreases from the light incidence surface, the maximum obtainable It is possible to obtain a photothermal magnetic recording medium that can efficiently produce optical reproduction output by effectively utilizing the Kerr rotation angle.
第1図はこの発明の一実施例の光熱磁気記録媒体の断面
図、第2図はこの発明の一実施例の光熱磁気記録媒体に
係わる三元系磁性合金層の膜厚(5)による各組成元素
の変化(a十%)を示す特性図、第3図は、この発明の
他の実施例の光熱磁気記録媒体の断面図である。
図において、(1)は基板、(2)はT b−F e−
Co三元系非晶質磁性合金層である。FIG. 1 is a sectional view of a photothermal magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a photothermal magnetic recording medium according to an embodiment of the present invention. FIG. 3, a characteristic diagram showing changes in compositional elements (a 10%), is a sectional view of a photothermal magnetic recording medium according to another embodiment of the present invention. In the figure, (1) is the substrate, (2) is T b-F e-
This is a Co ternary amorphous magnetic alloy layer.
Claims (1)
Fe_1_−_yCo_y)_1_−_xで示されるT
b−Fe−Co三元系非晶質磁性合金層を基板に設ける
ものにおいて、上記磁性層を、0.15≦x≦0.35
、0<y<0.5の範囲で、光の入射面から順次xが増
加し、yが減少するように積層したことを特徴とする光
熱磁気記録媒体。It has an axis of easy magnetization in the direction perpendicular to the film surface, and has the general formula Tb_x(
T denoted by Fe_1_-_yCo_y)_1_-_x
In the case where a b-Fe-Co ternary amorphous magnetic alloy layer is provided on the substrate, the magnetic layer has a 0.15≦x≦0.35
, 0<y<0.5, the photothermal magnetic recording medium is characterized in that the layers are stacked so that x increases and y decreases sequentially from the light incident surface within the range of 0<y<0.5.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11977787A JPH0795377B2 (en) | 1987-05-14 | 1987-05-14 | Photothermal magnetic recording medium |
| US07/752,976 US5248565A (en) | 1987-01-26 | 1991-09-03 | Optical-thermal magnetic storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11977787A JPH0795377B2 (en) | 1987-05-14 | 1987-05-14 | Photothermal magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63282945A true JPS63282945A (en) | 1988-11-18 |
| JPH0795377B2 JPH0795377B2 (en) | 1995-10-11 |
Family
ID=14769960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11977787A Expired - Lifetime JPH0795377B2 (en) | 1987-01-26 | 1987-05-14 | Photothermal magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795377B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362340A (en) * | 1989-07-28 | 1991-03-18 | Ricoh Co Ltd | magneto-optical recording medium |
| EP0642126A3 (en) * | 1993-09-02 | 1995-03-15 | Fujitsu Limited | Magneto-optic recording medium |
| US5824426A (en) * | 1994-10-14 | 1998-10-20 | Sharp Kabushiki Kaisga | Magneto-optical recording medium |
-
1987
- 1987-05-14 JP JP11977787A patent/JPH0795377B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362340A (en) * | 1989-07-28 | 1991-03-18 | Ricoh Co Ltd | magneto-optical recording medium |
| EP0642126A3 (en) * | 1993-09-02 | 1995-03-15 | Fujitsu Limited | Magneto-optic recording medium |
| US5824426A (en) * | 1994-10-14 | 1998-10-20 | Sharp Kabushiki Kaisga | Magneto-optical recording medium |
| US5922177A (en) * | 1994-10-14 | 1999-07-13 | Sharp Kabushiki Kaisha | Magneto-optical recording medium and producing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0795377B2 (en) | 1995-10-11 |
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