JPS63301952A - イオンビーム加工方法およびその装置 - Google Patents

イオンビーム加工方法およびその装置

Info

Publication number
JPS63301952A
JPS63301952A JP62058360A JP5836087A JPS63301952A JP S63301952 A JPS63301952 A JP S63301952A JP 62058360 A JP62058360 A JP 62058360A JP 5836087 A JP5836087 A JP 5836087A JP S63301952 A JPS63301952 A JP S63301952A
Authority
JP
Japan
Prior art keywords
ion beam
pattern
focused ion
mask
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62058360A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553259B2 (2
Inventor
Kojin Yasaka
行人 八坂
Yoshitomo Nakagawa
良知 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments and Electronics Ltd filed Critical Seiko Instruments and Electronics Ltd
Priority to JP62058360A priority Critical patent/JPS63301952A/ja
Publication of JPS63301952A publication Critical patent/JPS63301952A/ja
Publication of JPH0553259B2 publication Critical patent/JPH0553259B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP62058360A 1986-12-26 1987-03-13 イオンビーム加工方法およびその装置 Granted JPS63301952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62058360A JPS63301952A (ja) 1986-12-26 1987-03-13 イオンビーム加工方法およびその装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP31526386 1986-12-26
JP61-315263 1986-12-26
JP62058360A JPS63301952A (ja) 1986-12-26 1987-03-13 イオンビーム加工方法およびその装置

Publications (2)

Publication Number Publication Date
JPS63301952A true JPS63301952A (ja) 1988-12-08
JPH0553259B2 JPH0553259B2 (2) 1993-08-09

Family

ID=18063323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62058360A Granted JPS63301952A (ja) 1986-12-26 1987-03-13 イオンビーム加工方法およびその装置

Country Status (1)

Country Link
JP (1) JPS63301952A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5036044A (en) * 1988-09-29 1991-07-30 University Of Arkansas R-Tl-Sr-Ca-Cu-O superconductors
JPH04288542A (ja) * 1991-02-27 1992-10-13 Mitsubishi Electric Corp 位相シフトマスクおよびその修正方法
US5807650A (en) * 1992-03-24 1998-09-15 Kabushiki Kaisha Toshiba Photo mask and apparatus for repairing photo mask

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997690A (2) * 1973-01-19 1974-09-14
JPS55150225A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Method of correcting white spot fault of photomask
JPS5693329A (en) * 1979-12-26 1981-07-28 Nec Corp Etching device
JPS5713177A (en) * 1980-06-24 1982-01-23 Toshiba Corp Etching method
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS59151427A (ja) * 1983-02-18 1984-08-29 Agency Of Ind Science & Technol イオンビ−ム加工装置
JPS59208830A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd イオンビ−ム加工方法およびその装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997690A (2) * 1973-01-19 1974-09-14
JPS55150225A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Method of correcting white spot fault of photomask
JPS5693329A (en) * 1979-12-26 1981-07-28 Nec Corp Etching device
JPS5713177A (en) * 1980-06-24 1982-01-23 Toshiba Corp Etching method
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS59151427A (ja) * 1983-02-18 1984-08-29 Agency Of Ind Science & Technol イオンビ−ム加工装置
JPS59208830A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd イオンビ−ム加工方法およびその装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5036044A (en) * 1988-09-29 1991-07-30 University Of Arkansas R-Tl-Sr-Ca-Cu-O superconductors
JPH04288542A (ja) * 1991-02-27 1992-10-13 Mitsubishi Electric Corp 位相シフトマスクおよびその修正方法
US5807650A (en) * 1992-03-24 1998-09-15 Kabushiki Kaisha Toshiba Photo mask and apparatus for repairing photo mask

Also Published As

Publication number Publication date
JPH0553259B2 (2) 1993-08-09

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