JPS6336034U - - Google Patents

Info

Publication number
JPS6336034U
JPS6336034U JP1986129917U JP12991786U JPS6336034U JP S6336034 U JPS6336034 U JP S6336034U JP 1986129917 U JP1986129917 U JP 1986129917U JP 12991786 U JP12991786 U JP 12991786U JP S6336034 U JPS6336034 U JP S6336034U
Authority
JP
Japan
Prior art keywords
mask
alignment mark
light
substrate
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986129917U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241862Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129917U priority Critical patent/JPH0241862Y2/ja
Publication of JPS6336034U publication Critical patent/JPS6336034U/ja
Application granted granted Critical
Publication of JPH0241862Y2 publication Critical patent/JPH0241862Y2/ja
Expired legal-status Critical Current

Links

JP1986129917U 1986-08-26 1986-08-26 Expired JPH0241862Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (cs) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (cs) 1986-08-26 1986-08-26

Publications (2)

Publication Number Publication Date
JPS6336034U true JPS6336034U (cs) 1988-03-08
JPH0241862Y2 JPH0241862Y2 (cs) 1990-11-08

Family

ID=31026924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129917U Expired JPH0241862Y2 (cs) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPH0241862Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ
JP2012242576A (ja) * 2011-05-19 2012-12-10 V Technology Co Ltd フォトマスク及び露光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011668A (cs) * 1973-06-01 1975-02-06
JPS52144973A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Positioning method of semiconductor wafers
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS60110119A (ja) * 1983-11-21 1985-06-15 Canon Inc 位置合わせ方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011668A (cs) * 1973-06-01 1975-02-06
JPS52144973A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Positioning method of semiconductor wafers
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS60110119A (ja) * 1983-11-21 1985-06-15 Canon Inc 位置合わせ方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ
JP2012242576A (ja) * 2011-05-19 2012-12-10 V Technology Co Ltd フォトマスク及び露光装置

Also Published As

Publication number Publication date
JPH0241862Y2 (cs) 1990-11-08

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