JPS6339855U - - Google Patents

Info

Publication number
JPS6339855U
JPS6339855U JP13342086U JP13342086U JPS6339855U JP S6339855 U JPS6339855 U JP S6339855U JP 13342086 U JP13342086 U JP 13342086U JP 13342086 U JP13342086 U JP 13342086U JP S6339855 U JPS6339855 U JP S6339855U
Authority
JP
Japan
Prior art keywords
microanalyzer
acceleration voltage
generated
electron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13342086U
Other languages
English (en)
Other versions
JPH0515718Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13342086U priority Critical patent/JPH0515718Y2/ja
Publication of JPS6339855U publication Critical patent/JPS6339855U/ja
Application granted granted Critical
Publication of JPH0515718Y2 publication Critical patent/JPH0515718Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の位置実施例を示す装置の構成
図、第２，３図は、それぞれ同上装置の動作を示
す説明図、第４図は本考案の第２の実施例を示す
装置の構成図、及び第５図は第４図装置の動作を
示す説明図である。 １…Ｘ線マイクロアナライザー本体、１ａ…電
子銃、１ｂ…コンデンサーレンズ、１ｃ…試料載
置台、１ｄ…分光器、１…Ｘ線検出器、５…キイ
ボード。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電子銃からの電子ビームを照射して試料から発
    生するＸ線を分光しつつ検出するマイクロアナラ
    イザーにおいて、加速電圧に関わりなく、電流を
    一定に維持させて２複数種類の加速電圧で電子ビ
    ームを発生させる制御回路と、前記加速電圧毎の
    Ｘ線強度の差分を演算する回路を備えたことを特
    徴とするＸ線マイクロアナライザー。
JP13342086U 1986-08-29 1986-08-29 Expired - Lifetime JPH0515718Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13342086U JPH0515718Y2 (ja) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13342086U JPH0515718Y2 (ja) 1986-08-29 1986-08-29

Publications (2)

Publication Number Publication Date
JPS6339855U true JPS6339855U (ja) 1988-03-15
JPH0515718Y2 JPH0515718Y2 (ja) 1993-04-26

Family

ID=31033721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13342086U Expired - Lifetime JPH0515718Y2 (ja) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPH0515718Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267342A (ja) * 1992-04-14 1994-09-22 Belden Wire & Cable Co 可撓性シールドケーブル
EP3945311A1 (en) 2020-07-27 2022-02-02 Jeol Ltd. Sample analysis apparatus and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267342A (ja) * 1992-04-14 1994-09-22 Belden Wire & Cable Co 可撓性シールドケーブル
EP3945311A1 (en) 2020-07-27 2022-02-02 Jeol Ltd. Sample analysis apparatus and method
JP2022023557A (ja) * 2020-07-27 2022-02-08 日本電子株式会社 試料分析装置及び方法
US11674913B2 (en) 2020-07-27 2023-06-13 Jeol Ltd. Sample analysis apparatus and method

Also Published As

Publication number Publication date
JPH0515718Y2 (ja) 1993-04-26

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