JPS6350156U - - Google Patents

Info

Publication number
JPS6350156U
JPS6350156U JP14497786U JP14497786U JPS6350156U JP S6350156 U JPS6350156 U JP S6350156U JP 14497786 U JP14497786 U JP 14497786U JP 14497786 U JP14497786 U JP 14497786U JP S6350156 U JPS6350156 U JP S6350156U
Authority
JP
Japan
Prior art keywords
semiconductor laser
beams
output
monitor device
beam semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14497786U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14497786U priority Critical patent/JPS6350156U/ja
Publication of JPS6350156U publication Critical patent/JPS6350156U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案に係るモニタ装置の模式的斜視
図、第2図は本考案に係るモニタ装置を3ビーム
半導体レーザに組合せた状態を示す平面図である
。 1……ウエハ、2a,2b,2c……フオトダ
イオード、3a,3b,3c……溝、4a,4c
……溝、5a,5b,5c……ブロツク、6a,
6b……遮光壁、10……3ビーム半導体レーザ

Claims (1)

  1. 【実用新案登録請求の範囲】 1 マルチビーム半導体レーザの各ビームの出力
    をモニタする装置において、 各ビームに対応する位置に設けられ、各ビーム
    の出力を検出するビーム数と同数の光検出部と、
    各ビームが交錯しないように各ビームの進路間及
    び前記光検出部間に設けられた遮光手段とを具備
    することを特徴とするマルチビーム半導体レーザ
    用モニタ装置。 2 前記光検出部と前記遮光手段とが一体に構成
    されている実用新案登録請求の範囲第1項記載の
    マルチビーム半導体レーザ用モニタ装置。
JP14497786U 1986-09-19 1986-09-19 Pending JPS6350156U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14497786U JPS6350156U (ja) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14497786U JPS6350156U (ja) 1986-09-19 1986-09-19

Publications (1)

Publication Number Publication Date
JPS6350156U true JPS6350156U (ja) 1988-04-05

Family

ID=31056087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14497786U Pending JPS6350156U (ja) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPS6350156U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173238A (en) * 1981-04-17 1982-10-25 Matsushita Electric Ind Co Ltd Optical transmitter
JPS61152088A (ja) * 1984-12-26 1986-07-10 Canon Inc 半導体レ−ザ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173238A (en) * 1981-04-17 1982-10-25 Matsushita Electric Ind Co Ltd Optical transmitter
JPS61152088A (ja) * 1984-12-26 1986-07-10 Canon Inc 半導体レ−ザ

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