JPS635632U - - Google Patents

Info

Publication number
JPS635632U
JPS635632U JP9866486U JP9866486U JPS635632U JP S635632 U JPS635632 U JP S635632U JP 9866486 U JP9866486 U JP 9866486U JP 9866486 U JP9866486 U JP 9866486U JP S635632 U JPS635632 U JP S635632U
Authority
JP
Japan
Prior art keywords
magnet
rotating
rotating shaft
fixed magnet
indicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9866486U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9866486U priority Critical patent/JPS635632U/ja
Publication of JPS635632U publication Critical patent/JPS635632U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は本考案に使用するドライエツチング装
置の概略側断面図、第２図は本考案による一実施
例を示す主要部の拡大図、第３図は従来技術に使
用するドライエツチング装置の概略側断面図、第
４図は従来技術の走査磁石の斜視図、第５図は従
来技術によるエツチング量分布を示す図である。 図において、１は処理チヤンバ、２は陽極電極
、３は陰極電極、４はウエーハ、５は高周波発振
器、６は回転磁石、７は回転軸、８は連動歯車、
９は固定磁石、１０は走査磁石、１１は従来技術
によるエツチング量分布曲線を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 並列する回転軸７と該回転軸７に軸着された回
    転磁石６と回転伝達機構８を有し、該回転磁石６
    と直交して配設する固定磁石９を備えてなること
    を特徴とするプラズマ処理装置。
JP9866486U 1986-06-26 1986-06-26 Pending JPS635632U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9866486U JPS635632U (ja) 1986-06-26 1986-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9866486U JPS635632U (ja) 1986-06-26 1986-06-26

Publications (1)

Publication Number Publication Date
JPS635632U true JPS635632U (ja) 1988-01-14

Family

ID=30966815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9866486U Pending JPS635632U (ja) 1986-06-26 1986-06-26

Country Status (1)

Country Link
JP (1) JPS635632U (ja)

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