JPS6359249B2 - - Google Patents
Info
- Publication number
- JPS6359249B2 JPS6359249B2 JP54096107A JP9610779A JPS6359249B2 JP S6359249 B2 JPS6359249 B2 JP S6359249B2 JP 54096107 A JP54096107 A JP 54096107A JP 9610779 A JP9610779 A JP 9610779A JP S6359249 B2 JPS6359249 B2 JP S6359249B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- wafers
- transfer
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
- H10P72/0612—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9610779A JPS5621340A (en) | 1979-07-30 | 1979-07-30 | Device for automatic treament of wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9610779A JPS5621340A (en) | 1979-07-30 | 1979-07-30 | Device for automatic treament of wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5621340A JPS5621340A (en) | 1981-02-27 |
| JPS6359249B2 true JPS6359249B2 (it) | 1988-11-18 |
Family
ID=14156156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9610779A Granted JPS5621340A (en) | 1979-07-30 | 1979-07-30 | Device for automatic treament of wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5621340A (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030057A (en) * | 1987-11-06 | 1991-07-09 | Tel Sagami Limited | Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer |
| JPH0384943A (ja) * | 1989-08-28 | 1991-04-10 | Tokyo Electron Ltd | トレー保持機構 |
-
1979
- 1979-07-30 JP JP9610779A patent/JPS5621340A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5621340A (en) | 1981-02-27 |
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