JPS636190A - プロフィル異常検出方法 - Google Patents

プロフィル異常検出方法

Info

Publication number
JPS636190A
JPS636190A JP61149772A JP14977286A JPS636190A JP S636190 A JPS636190 A JP S636190A JP 61149772 A JP61149772 A JP 61149772A JP 14977286 A JP14977286 A JP 14977286A JP S636190 A JPS636190 A JP S636190A
Authority
JP
Japan
Prior art keywords
profile
data
basis weight
peaks
peak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61149772A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213070B2 (fr
Inventor
山本　重彦
板垣　和雄
芳樹 佐野
光弘 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP61149772A priority Critical patent/JPS636190A/ja
Publication of JPS636190A publication Critical patent/JPS636190A/ja
Publication of JPH0213070B2 publication Critical patent/JPH0213070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
  • Paper (AREA)
JP61149772A 1986-06-27 1986-06-27 プロフィル異常検出方法 Granted JPS636190A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61149772A JPS636190A (ja) 1986-06-27 1986-06-27 プロフィル異常検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61149772A JPS636190A (ja) 1986-06-27 1986-06-27 プロフィル異常検出方法

Publications (2)

Publication Number Publication Date
JPS636190A true JPS636190A (ja) 1988-01-12
JPH0213070B2 JPH0213070B2 (fr) 1990-04-03

Family

ID=15482394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61149772A Granted JPS636190A (ja) 1986-06-27 1986-06-27 プロフィル異常検出方法

Country Status (1)

Country Link
JP (1) JPS636190A (fr)

Also Published As

Publication number Publication date
JPH0213070B2 (fr) 1990-04-03

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