JPS6367242U - - Google Patents

Info

Publication number
JPS6367242U
JPS6367242U JP1986162710U JP16271086U JPS6367242U JP S6367242 U JPS6367242 U JP S6367242U JP 1986162710 U JP1986162710 U JP 1986162710U JP 16271086 U JP16271086 U JP 16271086U JP S6367242 U JPS6367242 U JP S6367242U
Authority
JP
Japan
Prior art keywords
vacuum chamber
light source
observation window
processing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986162710U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986162710U priority Critical patent/JPS6367242U/ja
Publication of JPS6367242U publication Critical patent/JPS6367242U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の概念的断面図であ
る。 １：搬送室、２：処理室、５：観測窓、６：光
源、７：電極。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空室内で半導体素体に対する処理を行うもの
    において、真空室の壁の観測窓以外の位置に光源
    を備えることを特徴とする半導体製造装置。
JP1986162710U 1986-10-23 1986-10-23 Pending JPS6367242U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986162710U JPS6367242U (ja) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986162710U JPS6367242U (ja) 1986-10-23 1986-10-23

Publications (1)

Publication Number Publication Date
JPS6367242U true JPS6367242U (ja) 1988-05-06

Family

ID=31090234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986162710U Pending JPS6367242U (ja) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPS6367242U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252425A (ja) * 1988-08-16 1990-02-22 Tel Sagami Ltd 縦型熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252425A (ja) * 1988-08-16 1990-02-22 Tel Sagami Ltd 縦型熱処理装置

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