JPS638128Y2 - - Google Patents

Info

Publication number
JPS638128Y2
JPS638128Y2 JP1981040343U JP4034381U JPS638128Y2 JP S638128 Y2 JPS638128 Y2 JP S638128Y2 JP 1981040343 U JP1981040343 U JP 1981040343U JP 4034381 U JP4034381 U JP 4034381U JP S638128 Y2 JPS638128 Y2 JP S638128Y2
Authority
JP
Japan
Prior art keywords
furnace
reaction tube
cooling
heat
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981040343U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57153995U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981040343U priority Critical patent/JPS638128Y2/ja
Publication of JPS57153995U publication Critical patent/JPS57153995U/ja
Application granted granted Critical
Publication of JPS638128Y2 publication Critical patent/JPS638128Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
JP1981040343U 1981-03-24 1981-03-24 Expired JPS638128Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981040343U JPS638128Y2 (de) 1981-03-24 1981-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981040343U JPS638128Y2 (de) 1981-03-24 1981-03-24

Publications (2)

Publication Number Publication Date
JPS57153995U JPS57153995U (de) 1982-09-27
JPS638128Y2 true JPS638128Y2 (de) 1988-03-10

Family

ID=29837457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981040343U Expired JPS638128Y2 (de) 1981-03-24 1981-03-24

Country Status (1)

Country Link
JP (1) JPS638128Y2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691031B2 (ja) * 1986-11-25 1994-11-14 九州日本電気株式会社 拡散炉装置
JPH06103671B2 (ja) * 1987-02-14 1994-12-14 大日本スクリ−ン製造株式会社 基板の熱処理装置

Also Published As

Publication number Publication date
JPS57153995U (de) 1982-09-27

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