JPS6393642U - - Google Patents
Info
- Publication number
- JPS6393642U JPS6393642U JP18823986U JP18823986U JPS6393642U JP S6393642 U JPS6393642 U JP S6393642U JP 18823986 U JP18823986 U JP 18823986U JP 18823986 U JP18823986 U JP 18823986U JP S6393642 U JPS6393642 U JP S6393642U
- Authority
- JP
- Japan
- Prior art keywords
- insulating
- heating
- semiconductor wafer
- stand
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は第２図の―断面図、第２図は本考
案に係る静電チヤツクを示す平面図、第３図は従
来の静電チヤツクを示す平面図、第４図は第３図
の―断面図である。
２…中空枢軸、３，４…静電電極、５…絶縁層
、６…半導体ウエハ、１１…絶縁台、１４…加熱
冷却装置、１５…温度コントローラ、１６…発熱
体、１７…送風装置。
Fig. 1 is a sectional view of Fig. 2, Fig. 2 is a plan view showing the electrostatic chuck according to the present invention, Fig. 3 is a plan view showing the conventional electrostatic chuck, and Fig. 4 is the same as Fig. 3. -This is a cross-sectional view. 2... Hollow axis, 3, 4... Electrostatic electrode, 5... Insulating layer, 6... Semiconductor wafer, 11... Insulating stand, 14... Heating/cooling device, 15... Temperature controller, 16... Heating element, 17... Air blower.
Claims (1)
絶縁台と、この絶縁台に設けられその表面上に絶
縁層を介して半導体ウエハを吸着可能な静電電極
と、この静電電極に温度コントローラを介して接
続され前記半導体ウエハを加熱・冷却する加熱冷
却装置とを備え、この加熱冷却装置は前記絶縁台
の下方に設けられた発熱体および前記中空枢軸内
に冷却空気を供給する送風装置によつて構成され
ていることを特徴とする静電チヤツク。 An insulating stand that rotates by a hollow pivot extending horizontally, an electrostatic electrode that is provided on the insulating stand and can attract a semiconductor wafer through an insulating layer on the surface of the insulating stand, and a temperature a heating and cooling device connected via a controller to heat and cool the semiconductor wafer; the heating and cooling device includes a heating element provided below the insulating table and a blower device that supplies cooling air into the hollow shaft; An electrostatic chuck comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823986U JPS6393642U (en) | 1986-12-05 | 1986-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823986U JPS6393642U (en) | 1986-12-05 | 1986-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393642U true JPS6393642U (en) | 1988-06-17 |
Family
ID=31139417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18823986U Pending JPS6393642U (en) | 1986-12-05 | 1986-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393642U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029546A (en) * | 1988-06-29 | 1990-01-12 | Tokuda Seisakusho Ltd | electrostatic chuck |
| JPH11354527A (en) * | 1998-06-10 | 1999-12-24 | Sukegawa Electric Co Ltd | Plate body heating device |
| JP2014090167A (en) * | 2012-10-11 | 2014-05-15 | Lam Research Corporation | Delamination drying apparatus and method |
-
1986
- 1986-12-05 JP JP18823986U patent/JPS6393642U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029546A (en) * | 1988-06-29 | 1990-01-12 | Tokuda Seisakusho Ltd | electrostatic chuck |
| JPH11354527A (en) * | 1998-06-10 | 1999-12-24 | Sukegawa Electric Co Ltd | Plate body heating device |
| JP2014090167A (en) * | 2012-10-11 | 2014-05-15 | Lam Research Corporation | Delamination drying apparatus and method |