JPS6413123U - - Google Patents
Info
- Publication number
- JPS6413123U JPS6413123U JP10722487U JP10722487U JPS6413123U JP S6413123 U JPS6413123 U JP S6413123U JP 10722487 U JP10722487 U JP 10722487U JP 10722487 U JP10722487 U JP 10722487U JP S6413123 U JPS6413123 U JP S6413123U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- magnetic field
- plane
- sputtering device
- metal target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722487U JPS6413123U (2) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722487U JPS6413123U (2) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413123U true JPS6413123U (2) | 1989-01-24 |
Family
ID=31341443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10722487U Pending JPS6413123U (2) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413123U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067668A (ja) * | 1983-09-21 | 1985-04-18 | Fujitsu Ltd | スパッタリング装置 |
-
1987
- 1987-07-13 JP JP10722487U patent/JPS6413123U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067668A (ja) * | 1983-09-21 | 1985-04-18 | Fujitsu Ltd | スパッタリング装置 |
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