JPS6418732U - - Google Patents
Info
- Publication number
- JPS6418732U JPS6418732U JP1987113008U JP11300887U JPS6418732U JP S6418732 U JPS6418732 U JP S6418732U JP 1987113008 U JP1987113008 U JP 1987113008U JP 11300887 U JP11300887 U JP 11300887U JP S6418732 U JPS6418732 U JP S6418732U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- utility
- model registration
- exhaust means
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113008U JPS6418732U (da) | 1987-07-22 | 1987-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113008U JPS6418732U (da) | 1987-07-22 | 1987-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418732U true JPS6418732U (da) | 1989-01-30 |
Family
ID=31352467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987113008U Pending JPS6418732U (da) | 1987-07-22 | 1987-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418732U (da) |
-
1987
- 1987-07-22 JP JP1987113008U patent/JPS6418732U/ja active Pending