JPS641918A - Servo angle accelerometer - Google Patents

Servo angle accelerometer

Info

Publication number
JPS641918A
JPS641918A JP15722587A JP15722587A JPS641918A JP S641918 A JPS641918 A JP S641918A JP 15722587 A JP15722587 A JP 15722587A JP 15722587 A JP15722587 A JP 15722587A JP S641918 A JPS641918 A JP S641918A
Authority
JP
Japan
Prior art keywords
balance
coils
adhesive
flat spring
resin films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15722587A
Other languages
English (en)
Other versions
JPH011918A (ja
Inventor
Koichi Washisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15722587A priority Critical patent/JPS641918A/ja
Publication of JPH011918A publication Critical patent/JPH011918A/ja
Publication of JPS641918A publication Critical patent/JPS641918A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP15722587A 1987-06-24 1987-06-24 Servo angle accelerometer Pending JPS641918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15722587A JPS641918A (en) 1987-06-24 1987-06-24 Servo angle accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15722587A JPS641918A (en) 1987-06-24 1987-06-24 Servo angle accelerometer

Publications (2)

Publication Number Publication Date
JPH011918A JPH011918A (ja) 1989-01-06
JPS641918A true JPS641918A (en) 1989-01-06

Family

ID=15644959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15722587A Pending JPS641918A (en) 1987-06-24 1987-06-24 Servo angle accelerometer

Country Status (1)

Country Link
JP (1) JPS641918A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03104862U (ja) * 1990-02-07 1991-10-30
EP0697614A2 (en) 1991-03-22 1996-02-21 Nikon Corporation Optical apparatus for correcting image deviation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03104862U (ja) * 1990-02-07 1991-10-30
EP0697614A2 (en) 1991-03-22 1996-02-21 Nikon Corporation Optical apparatus for correcting image deviation
US5619735A (en) * 1991-03-22 1997-04-08 Nikon Corporation Optical apparatus for correcting image deviation

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