JPS642192B2 - - Google Patents

Info

Publication number
JPS642192B2
JPS642192B2 JP28312885A JP28312885A JPS642192B2 JP S642192 B2 JPS642192 B2 JP S642192B2 JP 28312885 A JP28312885 A JP 28312885A JP 28312885 A JP28312885 A JP 28312885A JP S642192 B2 JPS642192 B2 JP S642192B2
Authority
JP
Japan
Prior art keywords
reaction vessel
raw material
cylindrical
exhaust
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28312885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62142772A (ja
Inventor
Shigeru Shirai
Masaya Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP28312885A priority Critical patent/JPS62142772A/ja
Publication of JPS62142772A publication Critical patent/JPS62142772A/ja
Publication of JPS642192B2 publication Critical patent/JPS642192B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP28312885A 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置 Granted JPS62142772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28312885A JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28312885A JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Publications (2)

Publication Number Publication Date
JPS62142772A JPS62142772A (ja) 1987-06-26
JPS642192B2 true JPS642192B2 (cs) 1989-01-13

Family

ID=17661588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28312885A Granted JPS62142772A (ja) 1985-12-18 1985-12-18 マイクロ波プラズマｃｖｄ法による堆積膜形成装置

Country Status (1)

Country Link
JP (1) JPS62142772A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3343805B2 (ja) * 1995-08-15 2002-11-11 富士通株式会社 ディスク装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029470A (ja) * 1983-07-27 1985-02-14 Kyocera Corp 量産型グロ−放電分解装置

Also Published As

Publication number Publication date
JPS62142772A (ja) 1987-06-26

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