JPS6422026U - - Google Patents
Info
- Publication number
- JPS6422026U JPS6422026U JP11800987U JP11800987U JPS6422026U JP S6422026 U JPS6422026 U JP S6422026U JP 11800987 U JP11800987 U JP 11800987U JP 11800987 U JP11800987 U JP 11800987U JP S6422026 U JPS6422026 U JP S6422026U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- wafer
- furnace
- carrying
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は実施例の断面図、第２図は実施例の斜
視図、第３図は従来例の断面図である。 １は炉、２はウエハ、３はボート、４はフオー
ク、６，７はヒータである。
視図、第３図は従来例の断面図である。 １は炉、２はウエハ、３はボート、４はフオー
ク、６，７はヒータである。
Claims (1)
- 炉内にウエハを搬入するフオークに加熱手段を
設けたことを特徴とする半導体製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11800987U JPS6422026U (ja) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11800987U JPS6422026U (ja) | 1987-07-31 | 1987-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422026U true JPS6422026U (ja) | 1989-02-03 |
Family
ID=31361984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11800987U Pending JPS6422026U (ja) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422026U (ja) |
-
1987
- 1987-07-31 JP JP11800987U patent/JPS6422026U/ja active Pending