JPS642643B2 - - Google Patents

Info

Publication number
JPS642643B2
JPS642643B2 JP3142684A JP3142684A JPS642643B2 JP S642643 B2 JPS642643 B2 JP S642643B2 JP 3142684 A JP3142684 A JP 3142684A JP 3142684 A JP3142684 A JP 3142684A JP S642643 B2 JPS642643 B2 JP S642643B2
Authority
JP
Japan
Prior art keywords
pattern
fine
nozzle
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3142684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60177188A (ja
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuum Metallurgical Co Ltd
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Vacuum Metallurgical Co Ltd
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacuum Metallurgical Co Ltd, Shingijutsu Kaihatsu Jigyodan filed Critical Vacuum Metallurgical Co Ltd
Priority to JP3142684A priority Critical patent/JPS60177188A/ja
Publication of JPS60177188A publication Critical patent/JPS60177188A/ja
Publication of JPS642643B2 publication Critical patent/JPS642643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Powder Metallurgy (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP3142684A 1984-02-23 1984-02-23 貴金属による微細な焼成パタ−ン膜の形成法 Granted JPS60177188A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3142684A JPS60177188A (ja) 1984-02-23 1984-02-23 貴金属による微細な焼成パタ−ン膜の形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3142684A JPS60177188A (ja) 1984-02-23 1984-02-23 貴金属による微細な焼成パタ−ン膜の形成法

Publications (2)

Publication Number Publication Date
JPS60177188A JPS60177188A (ja) 1985-09-11
JPS642643B2 true JPS642643B2 (de) 1989-01-18

Family

ID=12330912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3142684A Granted JPS60177188A (ja) 1984-02-23 1984-02-23 貴金属による微細な焼成パタ−ン膜の形成法

Country Status (1)

Country Link
JP (1) JPS60177188A (de)

Also Published As

Publication number Publication date
JPS60177188A (ja) 1985-09-11

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