JPS642643B2 - - Google Patents

Info

Publication number: JPS642643B2
Authority: JP; Japan
Prior art keywords: pattern; fine; nozzle; film; substrate
Prior art date: 1984-02-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP3142684A

Other languages

English (en)

Japanese (ja)

Other versions

JPS60177188A (ja

Inventor

Chikara Hayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Vacuum Metallurgical Co Ltd

Shingijutsu Kaihatsu Jigyodan

Original Assignee

Vacuum Metallurgical Co Ltd

Shingijutsu Kaihatsu Jigyodan

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-02-23

Filing date

1984-02-23

Publication date

1989-01-18

1984-02-23 Application filed by Vacuum Metallurgical Co Ltd, Shingijutsu Kaihatsu Jigyodan filed Critical Vacuum Metallurgical Co Ltd

1984-02-23 Priority to JP3142684A priority Critical patent/JPS60177188A/ja

1985-09-11 Publication of JPS60177188A publication Critical patent/JPS60177188A/ja

1989-01-18 Publication of JPS642643B2 publication Critical patent/JPS642643B2/ja

Status Granted legal-status Critical Current

Links

239000000758 substrate Substances 0.000 claims description 11
239000010970 precious metal Substances 0.000 claims description 7
238000000034 method Methods 0.000 claims description 4
239000012159 carrier gas Substances 0.000 claims description 3
229910000510 noble metal Inorganic materials 0.000 claims description 3
238000005507 spraying Methods 0.000 claims description 3
239000002923 metal particle Substances 0.000 claims 1
239000000463 material Substances 0.000 description 7
238000010304 firing Methods 0.000 description 6
239000002245 particle Substances 0.000 description 6
239000011230 binding agent Substances 0.000 description 5
239000011882 ultra-fine particle Substances 0.000 description 5
239000012530 fluid Substances 0.000 description 4
239000007789 gas Substances 0.000 description 4
239000011521 glass Substances 0.000 description 4
238000010438 heat treatment Methods 0.000 description 4
239000007769 metal material Substances 0.000 description 2
239000003960 organic solvent Substances 0.000 description 2
239000000843 powder Substances 0.000 description 2
239000002994 raw material Substances 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 1
238000004132 cross linking Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
229910010272 inorganic material Inorganic materials 0.000 description 1
239000011147 inorganic material Substances 0.000 description 1
229910052763 palladium Inorganic materials 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
229920005596 polymer binder Polymers 0.000 description 1
239000002491 polymer binding agent Substances 0.000 description 1
230000007261 regionalization Effects 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000002904 solvent Substances 0.000 description 1
239000007921 spray Substances 0.000 description 1
229920003002 synthetic resin Polymers 0.000 description 1
239000000057 synthetic resin Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Surface Treatment Of Glass (AREA)
Powder Metallurgy (AREA)
Other Surface Treatments For Metallic Materials (AREA)

JP3142684A 1984-02-23 1984-02-23 貴金属による微細な焼成パタ−ン膜の形成法 Granted JPS60177188A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP3142684A JPS60177188A (ja)	1984-02-23	1984-02-23	貴金属による微細な焼成パタ−ン膜の形成法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP3142684A JPS60177188A (ja)	1984-02-23	1984-02-23	貴金属による微細な焼成パタ−ン膜の形成法

Publications (2)

Publication Number	Publication Date
JPS60177188A JPS60177188A (ja)	1985-09-11
JPS642643B2 true JPS642643B2 (fr)	1989-01-18

Family

ID=12330912

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3142684A Granted JPS60177188A (ja)	1984-02-23	1984-02-23	貴金属による微細な焼成パタ−ン膜の形成法

Country Status (1)

Country	Link
JP (1)	JPS60177188A (fr)

1984
- 1984-02-23 JP JP3142684A patent/JPS60177188A/ja active Granted

Also Published As

Publication number	Publication date
JPS60177188A (ja)	1985-09-11

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