JPS64268A - Valve for vapor growth - Google Patents

Valve for vapor growth

Info

Publication number
JPS64268A
JPS64268A JP15613387A JP15613387A JPS64268A JP S64268 A JPS64268 A JP S64268A JP 15613387 A JP15613387 A JP 15613387A JP 15613387 A JP15613387 A JP 15613387A JP S64268 A JPS64268 A JP S64268A
Authority
JP
Japan
Prior art keywords
gas
raw gas
inlet
cylinders
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15613387A
Other languages
Japanese (ja)
Other versions
JPH0471993B2 (en
JPH01268A (en
Inventor
Minoru Aragaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP15613387A priority Critical patent/JPS64268A/en
Publication of JPH01268A publication Critical patent/JPH01268A/en
Publication of JPS64268A publication Critical patent/JPS64268A/en
Publication of JPH0471993B2 publication Critical patent/JPH0471993B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To grow a high-quality semiconductor layer with good reproducibility and to sharply change the composition by annularly arranging a gas passage, introducing a raw gas a purge gas from the respective inlets, and switching the gas passages by a switching means.
CONSTITUTION: Cylinders 4a and 4b are arranged in the respective passages of the annularly arranged passage, and driven by respective driving sources 7a and 7b. When a raw gas is supplied, the driving sources 7a and 7b are operated to move the cylinders 4a and 4b to the positions as shown in the figure, and the raw gas introduced from a raw gas inlet 1 flows into a reaction furnace through a supply line 2. At this time, a carrier gas for purging is introduced at the same flow rate as that of the raw gas from an inlet 8, and discharged through a exhaust line 3. When the raw gas is subsequently discharged, the cylinders 4a and 4b are respectively moved to the upper end and the lower end, and the raw gas introduced from the inlet 1 is discharged from the line 3. At this time, the carrier gas is introduced from the inlet 8 at the same flow rate as that of the raw gas, and flows into the reaction furnace from the line 2.
COPYRIGHT: (C)1989,JPO&Japio
JP15613387A 1987-06-23 1987-06-23 Valve for vapor growth Granted JPS64268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15613387A JPS64268A (en) 1987-06-23 1987-06-23 Valve for vapor growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15613387A JPS64268A (en) 1987-06-23 1987-06-23 Valve for vapor growth

Publications (3)

Publication Number Publication Date
JPH01268A JPH01268A (en) 1989-01-05
JPS64268A true JPS64268A (en) 1989-01-05
JPH0471993B2 JPH0471993B2 (en) 1992-11-17

Family

ID=15621044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15613387A Granted JPS64268A (en) 1987-06-23 1987-06-23 Valve for vapor growth

Country Status (1)

Country Link
JP (1) JPS64268A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051205A (en) * 2003-06-11 2005-02-24 Asm Internatl Nv Gas supply system, valve assembly and method for forming reactant pulse by operating valve assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051205A (en) * 2003-06-11 2005-02-24 Asm Internatl Nv Gas supply system, valve assembly and method for forming reactant pulse by operating valve assembly

Also Published As

Publication number Publication date
JPH0471993B2 (en) 1992-11-17

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