JPS64268A - Valve for vapor growth - Google Patents

Valve for vapor growth

Info

Publication number: JPS64268A
Authority: JP; Japan
Prior art keywords: gas; raw gas; inlet; cylinders; line
Prior art date: 1987-06-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP15613387A

Other languages

English (en)

Other versions

JPH0471993B2 (ja

JPH01268A (ja

Inventor

Minoru Aragaki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hamamatsu Photonics KK

Original Assignee

Hamamatsu Photonics KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-06-23

Filing date

1987-06-23

Publication date

1989-01-05

1987-06-23 Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK

1987-06-23 Priority to JP15613387A priority Critical patent/JPS64268A/ja

1989-01-05 Publication of JPH01268A publication Critical patent/JPH01268A/ja

1989-01-05 Publication of JPS64268A publication Critical patent/JPS64268A/ja

1992-11-17 Publication of JPH0471993B2 publication Critical patent/JPH0471993B2/ja

Status Granted legal-status Critical Current

Links

239000007789 gas Substances 0.000 abstract 11
239000012159 carrier gas Substances 0.000 abstract 2
238000010926 purge Methods 0.000 abstract 2
239000004065 semiconductor Substances 0.000 abstract 1

Landscapes

Crystals, And After-Treatments Of Crystals (AREA)
Chemical Vapour Deposition (AREA)

JP15613387A 1987-06-23 1987-06-23 Valve for vapor growth Granted JPS64268A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15613387A JPS64268A (en)	1987-06-23	1987-06-23	Valve for vapor growth

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15613387A JPS64268A (en)	1987-06-23	1987-06-23	Valve for vapor growth

Publications (3)

Publication Number	Publication Date
JPH01268A JPH01268A (ja)	1989-01-05
JPS64268A true JPS64268A (en)	1989-01-05
JPH0471993B2 JPH0471993B2 (ja)	1992-11-17

Family

ID=15621044

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15613387A Granted JPS64268A (en)	1987-06-23	1987-06-23	Valve for vapor growth

Country Status (1)

Country	Link
JP (1)	JPS64268A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005051205A (ja) *	2003-06-11	2005-02-24	Asm Internatl Nv	ガス供給システム、弁アセンブリ、および弁アセンブリを操作することによる反応物質パルス形成方法

1987
- 1987-06-23 JP JP15613387A patent/JPS64268A/ja active Granted

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005051205A (ja) *	2003-06-11	2005-02-24	Asm Internatl Nv	ガス供給システム、弁アセンブリ、および弁アセンブリを操作することによる反応物質パルス形成方法

Also Published As

Publication number	Publication date
JPH0471993B2 (ja)	1992-11-17

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Legal Events

Date	Code	Title	Description
2007-05-28	S531	Written request for registration of change of domicile	Free format text: JAPANESE INTERMEDIATE CODE: R313532
2007-06-05	R350	Written notification of registration of transfer	Free format text: JAPANESE INTERMEDIATE CODE: R350
2007-06-23	EXPY	Cancellation because of completion of term
2007-09-12	FPAY	Renewal fee payment (prs date is renewal date of database)	Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20071117