JPS6431432A - Releasing method for chips - Google Patents

Releasing method for chips

Info

Publication number
JPS6431432A
JPS6431432A JP62188161A JP18816187A JPS6431432A JP S6431432 A JPS6431432 A JP S6431432A JP 62188161 A JP62188161 A JP 62188161A JP 18816187 A JP18816187 A JP 18816187A JP S6431432 A JPS6431432 A JP S6431432A
Authority
JP
Japan
Prior art keywords
chip
tape
slider
elevational
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62188161A
Other languages
English (en)
Inventor
Katsumasa Kosugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62188161A priority Critical patent/JPS6431432A/ja
Priority to EP19880115090 priority patent/EP0308809A3/en
Publication of JPS6431432A publication Critical patent/JPS6431432A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62188161A 1987-07-27 1987-07-27 Releasing method for chips Pending JPS6431432A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62188161A JPS6431432A (en) 1987-07-27 1987-07-27 Releasing method for chips
EP19880115090 EP0308809A3 (en) 1987-07-27 1988-09-15 Machinable stock and machined shaped article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62188161A JPS6431432A (en) 1987-07-27 1987-07-27 Releasing method for chips

Publications (1)

Publication Number Publication Date
JPS6431432A true JPS6431432A (en) 1989-02-01

Family

ID=16218821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62188161A Pending JPS6431432A (en) 1987-07-27 1987-07-27 Releasing method for chips

Country Status (1)

Country Link
JP (1) JPS6431432A (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592340A (ja) * 1982-06-29 1984-01-07 Fujitsu Ltd チツプハンドリング方法
JPS6022331A (ja) * 1983-07-19 1985-02-04 Nec Corp 半導体ペレツト選別方法
JPS622633A (ja) * 1985-06-28 1987-01-08 Toshiba Corp 半導体チツプの剥離方法および装置
JPS6216542A (ja) * 1985-07-15 1987-01-24 Matsushita Electronics Corp 半導体チツプの分離装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592340A (ja) * 1982-06-29 1984-01-07 Fujitsu Ltd チツプハンドリング方法
JPS6022331A (ja) * 1983-07-19 1985-02-04 Nec Corp 半導体ペレツト選別方法
JPS622633A (ja) * 1985-06-28 1987-01-08 Toshiba Corp 半導体チツプの剥離方法および装置
JPS6216542A (ja) * 1985-07-15 1987-01-24 Matsushita Electronics Corp 半導体チツプの分離装置

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