JPS6436962U - - Google Patents
Info
- Publication number
- JPS6436962U JPS6436962U JP13262887U JP13262887U JPS6436962U JP S6436962 U JPS6436962 U JP S6436962U JP 13262887 U JP13262887 U JP 13262887U JP 13262887 U JP13262887 U JP 13262887U JP S6436962 U JPS6436962 U JP S6436962U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- inductively coupled
- mass spectrometer
- coupled plasma
- signal amplification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003321 amplification Effects 0.000 claims description 5
- 238000009616 inductively coupled plasma Methods 0.000 claims description 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000002159 abnormal effect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の構成説明図、第２図は
従来例の構成説明図である。
１……プラズマトーチ、３……アルゴンガス供
給源、４ａ……レーザ光源、４ｄ，４ｄ′……試
料台、５……試料、７……高周波誘導結合プラズ
マ、８……ノズル、９……スキマー、１１……フ
オアチヤンバー、１３……センターチヤンバー、
１６……マスフイルタ、１７……リアチヤンバー
、２０……信号処理部、２１……センサ、２２…
…光ガイド穴、２３……信号増幅部、２４……警
報器。
FIG. 1 is an explanatory diagram of the configuration of an embodiment of the present invention, and FIG. 2 is an explanatory diagram of the configuration of a conventional example. 1... Plasma torch, 3... Argon gas supply source, 4a... Laser light source, 4d, 4d'... Sample stage, 5... Sample, 7... High frequency inductively coupled plasma, 8... Nozzle, 9... Skimmer, 11...Four chamber, 13...Center chamber,
16... Mass filter, 17... Rear chamber, 20... Signal processing section, 21... Sensor, 22...
...Light guide hole, 23...Signal amplification unit, 24...Alarm device.
Claims (1)
起し生じたイオンを真空中に導入しイオン光学系
を通して質量分析計検出器に導いて検出すること
により前記試料中の被測定元素を分析する分析計
において、レーザ光源からのレーザ光を試料に照
射して該試料を気化させる試料チヤンバーと、前
記レーザ光を検出するセンサの上に前記試料が位
置するようにして前記試料を保持する試料台と、
前記センサからの光信号を導く光ガイド穴と、該
光ガイド穴を通つて導かれた光信号を検出して増
幅する信号増幅部と、該信号増幅部の出力を受け
て一定の警報を発する警報器とを具備し、前記レ
ーザ光が前記試料を透過して前記試料台に到達す
るような異常状態を事前に前記警報で知らせるよ
うに構成したことを特徴とする高周波誘導結合プ
ラズマ質量分析計。 (2) 前記信号増幅部は、前記光ガイド穴を通つ
て導かれた光信号を検出するフオトダイオードと
該フオトダイオードの出力を増幅する増幅器とか
らなる実用新案登録請求範囲第(1)項記載の高周
波誘導結合プラズマ質量分析計。[Claims for Utility Model Registration] (1) Ions produced by exciting a sample using high-frequency inductively coupled plasma are introduced into a vacuum, guided to a mass spectrometer detector through an ion optical system, and detected. In an analyzer for analyzing elements to be measured, the sample is positioned above a sample chamber that vaporizes the sample by irradiating the sample with laser light from a laser light source, and a sensor that detects the laser light. a sample stage that holds the sample;
a light guide hole that guides the light signal from the sensor; a signal amplification section that detects and amplifies the light signal guided through the light guide hole; and a signal amplification section that issues a certain alarm upon receiving the output of the signal amplification section. a high-frequency inductively coupled plasma mass spectrometer, characterized in that the high-frequency inductively coupled plasma mass spectrometer is equipped with an alarm, and is configured to notify in advance of an abnormal state in which the laser beam passes through the sample and reaches the sample stage with the alarm. . (2) The signal amplification unit includes a photodiode that detects the optical signal guided through the light guide hole and an amplifier that amplifies the output of the photodiode, as described in claim (1) of the utility model registration. high frequency inductively coupled plasma mass spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262887U JPH0518843Y2 (en) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262887U JPH0518843Y2 (en) | 1987-08-31 | 1987-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6436962U true JPS6436962U (en) | 1989-03-06 |
| JPH0518843Y2 JPH0518843Y2 (en) | 1993-05-19 |
Family
ID=31389766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13262887U Expired - Lifetime JPH0518843Y2 (en) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518843Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7615108B2 (en) | 2007-06-11 | 2009-11-10 | Mahle Filter Systems Japan Corp. | Canister |
| US7841321B2 (en) | 2005-01-28 | 2010-11-30 | Aisan Kogyo Kabushiki Kaisha | Canister and method of manufacturing the same |
| US7906078B2 (en) | 2002-06-18 | 2011-03-15 | Osaka Gas Co., Ltd. | Adsorbent of latent-heat storage type for canister and process for producing the same |
-
1987
- 1987-08-31 JP JP13262887U patent/JPH0518843Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7906078B2 (en) | 2002-06-18 | 2011-03-15 | Osaka Gas Co., Ltd. | Adsorbent of latent-heat storage type for canister and process for producing the same |
| US7841321B2 (en) | 2005-01-28 | 2010-11-30 | Aisan Kogyo Kabushiki Kaisha | Canister and method of manufacturing the same |
| US7615108B2 (en) | 2007-06-11 | 2009-11-10 | Mahle Filter Systems Japan Corp. | Canister |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518843Y2 (en) | 1993-05-19 |
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