JPS6436963U - - Google Patents
Info
- Publication number
- JPS6436963U JPS6436963U JP13262487U JP13262487U JPS6436963U JP S6436963 U JPS6436963 U JP S6436963U JP 13262487 U JP13262487 U JP 13262487U JP 13262487 U JP13262487 U JP 13262487U JP S6436963 U JPS6436963 U JP S6436963U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- laser light
- inductively coupled
- plasma torch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 230000008023 solidification Effects 0.000 claims 1
- 238000007711 solidification Methods 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の構成説明図、第２図は
従来例の構成説明図である。
１……プラズマトーチ、３……アルゴンガス供
給源、４ａ……レーザ光源４ａ、４ｄ……試料台
、５……試料、７……高周波誘導結合プラズマ、
８……ノズル、９……スキマー、１１……フオア
チヤンバー、１３……センターチヤンバー、１６
……マスフイルタ、１７……リアチヤンバー、２
０……信号処理部、２１……セパレータ、２１ａ
……セパレータの入口、２１ｂ……セパレータの
排出口、２１ｃ……セパレータの出口、２１ｄ…
…ボールジヨイント。
FIG. 1 is an explanatory diagram of the configuration of an embodiment of the present invention, and FIG. 2 is an explanatory diagram of the configuration of a conventional example. 1... Plasma torch, 3... Argon gas supply source, 4a... Laser light source 4a, 4d... Sample stage, 5... Sample, 7... High frequency inductively coupled plasma,
8... Nozzle, 9... Skimmer, 11... Front chamber, 13... Center chamber, 16
... Mass filter, 17 ... Rear chamber, 2
0...Signal processing unit, 21...Separator, 21a
...Separator inlet, 21b...Separator outlet, 21c...Separator outlet, 21d...
...Ball joint.
Claims (1)
起し生じたイオンを真空中に導入しイオン光学系
を通して質量分析計検出器に導いて検出すること
により前記試料中の被測定元素を分析する分析計
において、前記高周波誘導結合プラズマを生じさ
せるプラズマトーチと、レーザ光源からのレーザ
光を試料に照射して該試料を気化させる試料チヤ
ンバーと、該試料チヤンバー内で試料が蒸発した
のち固化して生ずる大粒の粒子を分離して除去す
ると共に均一な微粒子だけを前記プラズマトーチ
へ導くセパレータとを具備し、前記プラズマトー
チと前記試料チヤンバーとを近接して配置したこ
とを特徴とする高周波誘導結合プラズマ質量分析
計。 (2) 前記プラズマトーチは、最外室、外室、及
び内室を有する三重管構造のプラズマトーチでな
る実用新案登録請求範囲第(1)項記載の高周波誘
導結合プラズマ質量分析計。[Claims for Utility Model Registration] (1) Ions produced by exciting a sample using high-frequency inductively coupled plasma are introduced into a vacuum, guided through an ion optical system to a mass spectrometer detector, and detected. The analyzer for analyzing elements to be measured includes a plasma torch that generates the high-frequency inductively coupled plasma, a sample chamber that vaporizes the sample by irradiating the sample with laser light from a laser light source, and a sample chamber that vaporizes the sample by irradiating the sample with laser light from a laser light source. and a separator that separates and removes large particles produced by solidification after evaporation and guides only uniform fine particles to the plasma torch, and the plasma torch and the sample chamber are arranged close to each other. High frequency inductively coupled plasma mass spectrometer. (2) The high-frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the plasma torch is a triple-tube plasma torch having an outermost chamber, an outer chamber, and an inner chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262487U JPS6436963U (en) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262487U JPS6436963U (en) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436963U true JPS6436963U (en) | 1989-03-06 |
Family
ID=31389758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13262487U Pending JPS6436963U (en) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436963U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54162597A (en) * | 1978-06-14 | 1979-12-24 | Hitachi Ltd | Laser probe induction coupled plasma emission analyzing apparatus |
| JPS6148100A (en) * | 1984-08-15 | 1986-03-08 | シヨウワサ−ビス株式会社 | Car presence display system |
-
1987
- 1987-08-31 JP JP13262487U patent/JPS6436963U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54162597A (en) * | 1978-06-14 | 1979-12-24 | Hitachi Ltd | Laser probe induction coupled plasma emission analyzing apparatus |
| JPS6148100A (en) * | 1984-08-15 | 1986-03-08 | シヨウワサ−ビス株式会社 | Car presence display system |
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