JPS6437843A - Method and device for measuring lifetime of semiconductor - Google Patents

Method and device for measuring lifetime of semiconductor

Info

Publication number
JPS6437843A
JPS6437843A JP19417587A JP19417587A JPS6437843A JP S6437843 A JPS6437843 A JP S6437843A JP 19417587 A JP19417587 A JP 19417587A JP 19417587 A JP19417587 A JP 19417587A JP S6437843 A JPS6437843 A JP S6437843A
Authority
JP
Japan
Prior art keywords
wafer
electric field
lifetime
semiconductor
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19417587A
Other languages
English (en)
Other versions
JPH0573344B2 (ja
Inventor
Morimasa Miyazaki
Masataka Horai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Titanium Co Ltd
Original Assignee
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Titanium Co Ltd filed Critical Osaka Titanium Co Ltd
Priority to JP19417587A priority Critical patent/JPS6437843A/ja
Publication of JPS6437843A publication Critical patent/JPS6437843A/ja
Publication of JPH0573344B2 publication Critical patent/JPH0573344B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19417587A 1987-08-03 1987-08-03 Method and device for measuring lifetime of semiconductor Granted JPS6437843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19417587A JPS6437843A (en) 1987-08-03 1987-08-03 Method and device for measuring lifetime of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19417587A JPS6437843A (en) 1987-08-03 1987-08-03 Method and device for measuring lifetime of semiconductor

Publications (2)

Publication Number Publication Date
JPS6437843A true JPS6437843A (en) 1989-02-08
JPH0573344B2 JPH0573344B2 (ja) 1993-10-14

Family

ID=16320174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19417587A Granted JPS6437843A (en) 1987-08-03 1987-08-03 Method and device for measuring lifetime of semiconductor

Country Status (1)

Country Link
JP (1) JPS6437843A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181549A (ja) * 1983-03-31 1984-10-16 Mitsubishi Metal Corp 半導体ウエ−ハのライフタイム測定方法
JPS6025444A (ja) * 1983-07-22 1985-02-08 Nec Corp 結晶評価装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181549A (ja) * 1983-03-31 1984-10-16 Mitsubishi Metal Corp 半導体ウエ−ハのライフタイム測定方法
JPS6025444A (ja) * 1983-07-22 1985-02-08 Nec Corp 結晶評価装置

Also Published As

Publication number Publication date
JPH0573344B2 (ja) 1993-10-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees