JPS6438960A - Electron beam processing device - Google Patents

Electron beam processing device

Info

Publication number
JPS6438960A
JPS6438960A JP62195701A JP19570187A JPS6438960A JP S6438960 A JPS6438960 A JP S6438960A JP 62195701 A JP62195701 A JP 62195701A JP 19570187 A JP19570187 A JP 19570187A JP S6438960 A JPS6438960 A JP S6438960A
Authority
JP
Japan
Prior art keywords
magnetic field
coil
electronic optical
electronic
optical tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62195701A
Other languages
Japanese (ja)
Other versions
JP2529286B2 (en
Inventor
Fumiharu Yabunaka
Eishin Murakami
Masashi Yasunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62195701A priority Critical patent/JP2529286B2/en
Publication of JPS6438960A publication Critical patent/JPS6438960A/en
Application granted granted Critical
Publication of JP2529286B2 publication Critical patent/JP2529286B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To make it possible to obtain an electronic optical tube which can arrange a deflecting coil of magnetic field type at the circumference and has sufficient strength with low cost without lowering response frequency by forming a section of an electronic optical tube opposed to a coil out of semiconductive fine ceramics. CONSTITUTION:In an electronic beam processing device equipped with, at least, one coil among magnetic field type deflecting coils 25, 26 to deflection-scan an electronic beam 23 with high frequency and a magnetic field type conpensating coil 27 round an electronic optical tube 21, a part opposed to the coils 25-27 of the electronic optical tube 21 is formed of semiconductive fine ceramics. Thus, the conductivity of the material is lowered and skin effect can be substantially ignored and high speed responsiveness in the constituting part of an electronic optical system which drives in a high frequency magnetic field can be improved.
JP62195701A 1987-08-04 1987-08-04 Electronic beam processing equipment Expired - Lifetime JP2529286B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62195701A JP2529286B2 (en) 1987-08-04 1987-08-04 Electronic beam processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62195701A JP2529286B2 (en) 1987-08-04 1987-08-04 Electronic beam processing equipment

Publications (2)

Publication Number Publication Date
JPS6438960A true JPS6438960A (en) 1989-02-09
JP2529286B2 JP2529286B2 (en) 1996-08-28

Family

ID=16345542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62195701A Expired - Lifetime JP2529286B2 (en) 1987-08-04 1987-08-04 Electronic beam processing equipment

Country Status (1)

Country Link
JP (1) JP2529286B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362125U (en) * 1989-10-18 1991-06-18
JP2002330667A (en) * 2001-05-10 2002-11-19 Yutaka Moribe Small animal-rearing case using terrarium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5268918A (en) * 1975-12-05 1977-06-08 Hitachi Ltd Insulated transformer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5268918A (en) * 1975-12-05 1977-06-08 Hitachi Ltd Insulated transformer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362125U (en) * 1989-10-18 1991-06-18
JP2002330667A (en) * 2001-05-10 2002-11-19 Yutaka Moribe Small animal-rearing case using terrarium

Also Published As

Publication number Publication date
JP2529286B2 (en) 1996-08-28

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