JPS643922A - Manufacture of superconductive thin film - Google Patents
Manufacture of superconductive thin filmInfo
- Publication number
- JPS643922A JPS643922A JP62160236A JP16023687A JPS643922A JP S643922 A JPS643922 A JP S643922A JP 62160236 A JP62160236 A JP 62160236A JP 16023687 A JP16023687 A JP 16023687A JP S643922 A JPS643922 A JP S643922A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- oxygen
- barium
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000001301 oxygen Substances 0.000 abstract 5
- 229910052760 oxygen Inorganic materials 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 3
- 229910052802 copper Inorganic materials 0.000 abstract 3
- 239000010949 copper Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 229910052788 barium Inorganic materials 0.000 abstract 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 abstract 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 230000007935 neutral effect Effects 0.000 abstract 2
- -1 oxygen ion Chemical class 0.000 abstract 2
- 239000005751 Copper oxide Substances 0.000 abstract 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 229910052691 Erbium Inorganic materials 0.000 abstract 1
- 229910000431 copper oxide Inorganic materials 0.000 abstract 1
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 229910001882 dioxygen Inorganic materials 0.000 abstract 1
- 238000005566 electron beam evaporation Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052706 scandium Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052727 yttrium Inorganic materials 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To obtain a superconductive thin film with a high reproductivity by causing group IIIa metal, barium, copper and/or their oxides to adhere on a substrate at a normal temperature, irradiating an oxygen neutral beam onto the substrate to form a thin film, and then heat treating a specific temperature in an oxygen gas atmosphere. CONSTITUTION:Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and are made to evaporate by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of the substrate under evaporation is made normal temperature. Simultaneously with this, the oxygen ion drawn out of an oxygen ion source 7 is neutralized with a neutralizer 11, irradiated as an oxygen neutral beam (b) onto the surface of the substrate 8, reacts with respective substances evaporated, and forms a thin film on the surface of the substrate 8. After the film is formed, heat treatment is performed at 400-700 deg.C in an oxygen atmosphere to promote crystallization of orthorhombic system. This makes it possible to obtain a thin film consisting of group IIIa-barium-copper oxide with high reproductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160236A JPS643922A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62160236A JPS643922A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS643922A true JPS643922A (en) | 1989-01-09 |
Family
ID=15710647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62160236A Pending JPS643922A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS643922A (en) |
-
1987
- 1987-06-25 JP JP62160236A patent/JPS643922A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2194555B (en) | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film | |
| ATE81923T1 (en) | PROCESS FOR MAKING A LAYER OF A METAL OXIDE SUPERCONDUCTING MATERIAL BY LASER EVAPORATION. | |
| KR950703799A (en) | PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION | |
| EP0285132A3 (en) | Method for producing thin film of oxide superconductor | |
| DE59309018D1 (en) | Process for producing a metal oxide layer, vacuum treatment plant therefor and part coated with at least one metal oxide layer | |
| KR880011827A (en) | Manufacturing method of superconducting thin film. | |
| JPS6421973A (en) | Device for manufacturing superconductive material | |
| JPS643921A (en) | Manufacture of superconductive thin film | |
| JPS643923A (en) | Manufacture of superconductive thin film | |
| JPS5727079A (en) | Manufacture of josephson element of oxide superconductor | |
| JPS5476629A (en) | Coating composition | |
| JPS642214A (en) | Method of forming linear superconductor | |
| JPS5537429A (en) | Production of optical thin film | |
| JPS5565358A (en) | Forming method for titanium dioxide by normal temperature reaction evaporation | |
| JPS6443915A (en) | Manufacture of superconductive material | |
| JPS6443917A (en) | Forming device for superconductive thin film | |
| JPS54162453A (en) | Semiconductor manufacturing unit | |
| JPS6412420A (en) | Manufacture of superconducting film | |
| JPS5688319A (en) | Method for forming film pattern | |
| JPS6442568A (en) | Device for producing thin compound film | |
| JPS6452342A (en) | Manufacture of superconductive thin film | |
| JPH02197565A (en) | Target for laser vapor deposition apparatus | |
| JPH01102976A (en) | Oxide high temperature superconductor thin film pattern formation method | |
| JPS6450581A (en) | Manufacture of thin film superconducting element | |
| JPS6489572A (en) | Manufacture of high temperature superconducting thin film |