JPS64401A - Mechanism for attaching and detaching fine adjustment element for stm - Google Patents

Mechanism for attaching and detaching fine adjustment element for stm

Info

Publication number
JPS64401A
JPS64401A JP13388487A JP13388487A JPS64401A JP S64401 A JPS64401 A JP S64401A JP 13388487 A JP13388487 A JP 13388487A JP 13388487 A JP13388487 A JP 13388487A JP S64401 A JPS64401 A JP S64401A
Authority
JP
Japan
Prior art keywords
probe
fine adjustment
adjustment element
terminals
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13388487A
Other languages
English (en)
Other versions
JPH01401A (ja
Inventor
Koji Kajimura
Fumiki Sakai
Chikara Miyata
Shigeru Wakiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Instruments Inc filed Critical Agency of Industrial Science and Technology
Priority to JP13388487A priority Critical patent/JPS64401A/ja
Publication of JPH01401A publication Critical patent/JPH01401A/ja
Publication of JPS64401A publication Critical patent/JPS64401A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP13388487A 1987-05-29 1987-05-29 Mechanism for attaching and detaching fine adjustment element for stm Pending JPS64401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13388487A JPS64401A (en) 1987-05-29 1987-05-29 Mechanism for attaching and detaching fine adjustment element for stm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13388487A JPS64401A (en) 1987-05-29 1987-05-29 Mechanism for attaching and detaching fine adjustment element for stm

Publications (2)

Publication Number Publication Date
JPH01401A JPH01401A (ja) 1989-01-05
JPS64401A true JPS64401A (en) 1989-01-05

Family

ID=15115340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13388487A Pending JPS64401A (en) 1987-05-29 1987-05-29 Mechanism for attaching and detaching fine adjustment element for stm

Country Status (1)

Country Link
JP (1) JPS64401A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113104U (ja) * 1989-02-23 1990-09-11
JPH0312506A (ja) * 1989-06-09 1991-01-21 Jeol Ltd 走査型トンネル顕微鏡の走査像出力方式
EP0871006A1 (en) * 1997-04-09 1998-10-14 Seiko Instruments Inc. Scanning probe microscope
JPH1130573A (ja) * 1997-05-20 1999-02-02 Jeol Ltd ホルダ保持装置
CN106124805A (zh) * 2016-07-26 2016-11-16 苏州衡微仪器科技有限公司 一种扫描隧道显微镜的扫描结构

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113104U (ja) * 1989-02-23 1990-09-11
JPH0312506A (ja) * 1989-06-09 1991-01-21 Jeol Ltd 走査型トンネル顕微鏡の走査像出力方式
EP0871006A1 (en) * 1997-04-09 1998-10-14 Seiko Instruments Inc. Scanning probe microscope
JPH1130573A (ja) * 1997-05-20 1999-02-02 Jeol Ltd ホルダ保持装置
CN106124805A (zh) * 2016-07-26 2016-11-16 苏州衡微仪器科技有限公司 一种扫描隧道显微镜的扫描结构

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